Slider processing apparatus, load applying apparatus and auxiliary device for processing slider

ABSTRACT

It is an object of the invention to prevent a lapping member from being cut by an edge of a slider when the edge is chamfered by lapping it with the lapping member. 
     A slider held by a slider holding jig according to the invention is put in contact with a diamond lapping sheet. A load applying portion moves weights provided in the form of a plurality of stages downward from a state in which the lower end of a shaft portion of the weight at the bottom stage is located above the slider holding jig without contacting the slider holding jig, thereby loading the slider holding jig with the weights sequentially from the bottom stage.

This is a Division of application Ser. No. 09/397,869 filed Sep. 17,1999. The entire disclosure of the prior application(s) is herebyincorporated by reference herein in its entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an apparatus and method for processinga slider, a load applying apparatus for processing a slider and anauxiliary device for processing a slider which are employed forchamfering edges of a slider used for a flying type magnetic head or thelike.

2. Description of the Related Art

In general, a flying type magnetic head used in a magnetic disc drive orthe like has a configuration in which a thin film magnetic head elementis formed at the rear end of a slider. A slider generally has railportions whose surfaces face a recording medium (air bearing surfaces)and has a taper or step portion in the vicinity of the end at the airinflow side such that the rail portions fly slightly above the surfaceof a recording medium such as a magnetic disc or the like because of astream of air flowing in through the taper or step portion.

For example, as disclosed in Japanese unexamined patent publication(KOKAI) No. H6-282831, in order to prevent edges of a slider such asedges defined by the surfaces of the rail portions to face a recordingmedium and outer lateral walls of the rail portions from damaging therecording medium when the slider is inclined because of a shake or thelike, a chamfering process is performed on the edges of the slider.

For example, as disclosed in Japanese unexamined patent publication(KOKAI) No. H6-12645, a method for chamfering on edges of a slideraccording to the related art is to put the surface of a slider to face arecording medium into contact with a diamond lapping sheet provided onan elastic element with a load applied thereto and to lap the slider bymoving it relative to the diamond lapping sheet.

According to the above-described method for chamfering, a slider must beurged against the diamond lapping sheet by applying a load thereto.However, a problem has arisen in that the diamond lapping sheet can becut by edges of a slider especially before the chamfering of the edgesof the rail portions or at an early stage of the chamfering because thebase material of the diamond lapping sheet is thin.

According to the above-described method for chamfering, it is furthernecessary during actual processing to urge a slider against the diamondlapping sheet by applying a load to a jig. On the contrary, the loadmust not be applied to the jig when the slider is attached to or removedfrom the processing apparatus. This necessitates a mechanism forapplying the load to the jig only when needed.

A possible mechanism for this purpose is a mechanism having a weightwith a shaft portion which can be put into contact with a jig at thelower end thereof and a large diameter portion greater in the diameterthan the shaft portion and having a weight holding portion formed with ahole which allows the shaft portion of the weight to pass therethroughand which disallows the large-diameter portion to pass therethrough, forholding the weight movably in the axial direction of the shaft portionof the weight with the hole, the mechanism allowing the weight holdingportion to be moved up and down.

However, such a mechanism has a problem in that the weight can not besmoothly moved relative to the weight holding portion because the shaftportion of the weight frequently rubs against the hole of the weightholding portion to generate chips (particles).

According to the above-described method for chamfering, the entire edgesof a slider are substantially uniformly chamfered.

However, the above-described method for chamfering had a problem in thatit does not allow a part of the edges of a slider, e.g., a region of theedges at the air inflow side of the slider, to be chamfered in a greateramount than in other regions of the edges even when it is desired.

A slider for a magnetic head is formed by cutting a wafer having amultiplicity of magnetic head elements formed in a matrix configurationin one direction to form blocks referred to as “bars” which include aplurality of magnetic head elements arranged in a row, forming railportions on the bars and thereafter cutting the bars into each separateslider. Referring now to a slider as disclosed in Japanese unexaminedpatent publication (KOKAI) No. H6-282831, outer lateral walls of tworail portions serve as lateral walls of a slider as they are. However,the configuration as disclosed in Japanese patent publication (KOKAI)No. H6-282831 has a problem in that rail portions can be broken off(chipping) as a result of mechanical processing to cut bars intosliders.

For this reason, sliders as shown in FIG. 47 have become popular inwhich rail portions 213 are formed such that lateral walls 214 of therail portions 213 are located inside lateral walls 212 of a slider 211or cut portions of a bar with a predetermined distance therebetween. Aslider having such a configuration will be hereinafter referred to as “aslider having a two-step structure”.

In such a slider having a two-step structure, chamfering is alsoperformed on edges of the rail portions. For example, as disclosed inJapanese unexamined patent publication No. H6-12645, a method forchamfering edges of rail portions according to the related art is toslide the slider on a diamond lapping sheet provided on an elasticelement. FIG. 48 schematically illustrates the method for chamferingaccording to the related art. According to the method for chamfering ofthe related art, a plurality of sliders 211 are fixed to a jig 215 andare slid in two horizontal directions on a diamond lapping sheet 217provided on a plate-like elastic member 216 formed from, for example,silicone rubber while urging them in the direction of the arrowindicated by a reference number 218 in the figure, thereby chamferingedges 219 of rail portions 213.

FIG. 49 is an enlarged view of the neighborhood of edges 219 of railportions 213 (the region C in FIG. 48) which have been chamferedaccording to the method illustrated in FIG. 48.

As disclosed in Japanese unexamined patent publication (KOKAI) No.H2-301014, another method for chamfering according to the related art isto move a lapping tape back and forth under the guidance of a guide tothereby slide the lapping tape relative to rail portions of a slider.

There is a recent need for a reduction in the flying amount of a sliderin order to improve the recording density. There is also a need forimproved stability of the flying of a slider in order to increase accessspeed. Negative pressure sliders have recently come into use to satisfysuch needs. In general, a negative pressure slider is formed with aprojection for generating a negative pressure between the two railportions thereof. In such a negative pressure slider, the surface towarda recording medium has a microscopic configuration and, especially, theheight of the rail portions is significantly smaller than that inconventional sliders.

In such a negative pressure slider, as shown in FIG. 50, the smallheight of the rail portions has resulted in a problem in that arecording medium 225 can be put into contact with and damaged by an edge224 defined by a lateral wall 222 of a slider 221 and a surface 223 ofthe slider toward the recording medium perpendicular thereto when theslider 221 is inclined. The above-described problem is significantespecially in a hard disc device used in a portable apparatus such as anotebook type personal computer in which the slider is often inclined.

Under such circumstances, the inventors have proposed, for example inJapanese unexamined patent publication (KOKAI) No. H11-238214 and U.S.patent application Ser. No. 09/064,734, a technique for lapping andchamfering a plurality of edges having steps of a slider simultaneouslyby transforming a diamond lapping sheet using a wire. In this case,since processing accuracy is reduced if the tension of the wire isunstable, the tension of the wire must be made stable in order toimprove processing accuracy.

OBJECTS AND SUMMARY OF THE INVENTION

It is a first object of the invention to provide an apparatus and methodfor processing a slider and a load applying apparatus for processing aslider which make it possible to prevent an edge of a slider fromcutting a lapping member when the edge of the slider is lapped with thelapping member to chamfer the edge.

It is a second object of the invention to provide an apparatus forprocessing a slider and a load applying apparatus for processing aslider wherein a load can be applied to a slider holder for holding aslider only when needed during lapping on an edge of a slider to chamferthe edge and wherein the mechanism can operate smoothly.

It is a third object of the invention to provide an apparatus and methodfor processing a slider and auxiliary device for processing a sliderwhich make it possible to chamfer a part of an edge of a slider in agreater amount than in other regions of the edge.

It is a fourth object of the invention to provide an apparatus andauxiliary device for processing a slider which make it possible to lapand chamfer a plurality of edges having steps of a slider simultaneouslywith improved processing accuracy.

A first slider processing apparatus according to the invention is anapparatus for lapping an edge of a slider having a surface to face amedium to chamfer the edge, comprising:

a slider holder for holding a slider;

a lapping member for lapping an edge of the slider held by the sliderholder;

load applying means (apparatus) for applying a load to the slider holderso as to urge the slider held by the slider holder against the lappingmember, capable of adjusting the load applied to the slider holder; and

moving means (device) for moving the slider held by the slider holderand the lapping member relative to each other such that the edge of theslider is lapped by the lapping member.

In the first processing apparatus according to the invention, the loadapplying means (apparatus) applies a load to the slider holder so as tourge the slider held by the slider holder against the lapping member,and the load applied to the slider holder is adjusted.

For example, the lapping member of the first processing apparatusaccording to the invention is in the form of a sheet.

For example, the load applying means (apparatus) of the first processingapparatus according to the invention has a plurality of weights forapplying a load to the slider holder and load adjusting means (device)for adjusting the load by applying the load originating from theplurality of weights to the slider holder in a stepwise manner. In thiscase, for example, the weights include a shaft portion and a largediameter portion greater in the diameter than the shaft portion. Theload adjusting means (device) includes weight holding portions in theform of a plurality of stages each formed with a hole which allows theshaft portion of the weight to pass therethrough and disallows the largediameter portion to pass therethrough for holding the weight movably inthe axial direction of the shaft portion with the hole and includesweight holding portion moving means for moving the weight holdingportion up and down. The load adjusting means (device) moves the weightholding portions downward with the weight holding portion moving meansfrom a position in which the lower end of the shaft portion of theweight held by the weight holding portion at the bottom stage is locatedabove the slider holder without contacting the slider holder to load theslider holder with the weights held by the weight holding portions inthe form of a plurality of stages sequentially from the bottom stage.The weights comprise one or more blocks having a predetermined weight.

In the first processing apparatus according to the invention, a spiral(helical) groove may be formed on at least either the outercircumferential surface of the shaft portions of the weights or theinner circumferential surface of the holes of the weight holdingportions.

For example, the lapping member of the first processing apparatusaccording to the invention may have a lapping surface, and theprocessing apparatus may further have a positioning device forpositioning the slider holder such that a slider is put into contactwith the lapping member in a state in which the surface of the slider toface a medium is inclined relative to the lapping surface of the lappingmember. In this case, for example, the slider may include a plurality ofedges having steps; the lapping member may have flexibility; and theprocessing apparatus may further have transforming means (device) fortransforming the lapping member such that the plurality of edges havingsteps of the slider are simultaneously lapped by the lapping member.

In the first processing apparatus according to the invention, the slidermay include a plurality of edges having steps, and the lapping membermay have flexibility. The processing apparatus may further have atransforming device for transforming the lapping member such that theplurality of edges having steps of the slider are simultaneously lappedby the lapping member, which has a main body provided in a positionopposite to the slider held by the slider holder with the lapping membersandwiched therebetween and a wire wound around the outer circumferenceof the main body for transforming the lapping member. The transformingdevice may further have an elastic member or a projection provided undera part of the wire located on the top surface of the transformingdevice.

A first method for processing a slider according to the inventioncomprises the steps of:

chamfering an edge of a slider having a surface to face a medium bylapping the edge with a lapping member for lapping an edge of a sliderwith the slider and lapping member moved relative to each other whileapplying a load to a slider holder so as to urge the slider against thelapping member; and

changing the load applied to the slider holder depending on the progressof chamfering.

In the first method for processing according to the invention, thelapping member is, for example, in the form of a sheet.

In the step of changing the load of the first method for processingaccording to the invention, the load applied to the slider holder may beincreased in a stepwise manner depending on the progress of chamfering.

In the method for chamfering according to the invention, for example,the lapping member may have a lapping surface, and the step ofchamfering may include the steps of putting the slider in contact withthe lapping member with the surface of the slider to face a mediuminclined relative to the lapping surface of the lapping member andlapping a predetermined edge of the slider with the lapping member whilemoving the slider and the lapping member relative to each other in astate in which the slider is in contact with the lapping member with thesurface of the slider to face a medium inclined relative to the lappingsurface of the lapping. In this case, for example, the slider mayinclude a plurality of edges having steps; the lapping member may haveflexibility; and the step of lapping may simultaneously lap theplurality of edges having steps of the slider with the lapping member bytransforming the lapping member.

In the first method for processing according to the invention, forexample, the lapping member may have a lapping surface; the step ofchamfering may include a first lapping step for lapping a part of anedge of the slider in contact with the lapping member while moving theslider and the lapping member relative to each other in a state in whichthe slider is in contact with the lapping member with the surface of theslider to face a medium inclined relative to the lapping surface of thelapping member and a second lapping step for lapping a part of the edgeof the slider in contact with the lapping member while moving the sliderand the lapping member relative to each other in a state in which theslider is in contact with the lapping member with the surface of theslider to face a medium in parallel with the lapping surface of thelapping member.

In this case, for example, the slider may include a plurality of edgeshaving steps; the lapping member may have flexibility; and the firstlapping step may simultaneously lap the plurality of edges having stepsof the slider with the lapping member by transforming the lappingmember. The second lapping step may lap the plurality of edges havingsteps of the slider with the lapping member by transforming the lappingmember. For example, the slider may include a plurality of edges havingsteps, and the first lapping step may include the steps of lapping theedges of the slider with the lapping member without transforming thelapping member and simultaneously lapping the plurality of edges havingsteps of the slider with the lapping member by transforming the lappingmember having flexibility. The first lapping step may chamfer at least apart of an edge in contact with the lapping member into a slantingsurface, and the second lapping step may chamfer the edge chamfered intoa slanting surface at the first lapping step into a curved surface.

A first load applying apparatus for processing a slider according to theinvention is an apparatus which is used for a slider processingapparatus for lapping an edge of a slider having a surface to face amedium to chamfer the edge, comprising a slider holder for holding aslider having a surface to face a medium, a lapping member for lappingan edge of the slider held by the slider holder and moving means(device) for moving the slider held by the slider holder and the lappingmember relative to each other so as to lap the edge of the slider withthe lapping member and which applies a load to the slider holder so asto urge the slider held by the slider holder against the lapping member.

The first load applying apparatus according to the invention comprises:

a plurality of weights for applying a load to a slider holder; and

load adjusting means (device) for adjusting the load by applying theload originating from the plurality of weights to the slider holder in astepwise manner.

The weights include a shaft portion and a large diameter portion whichis greater in the diameter than the shaft portion.

The load adjusting means (device) includes weight holding portions inthe form of a plurality of stages each formed with a hole which allowsthe shaft portion of the weight to pass therethrough and disallows thelarge diameter portion to pass therethrough for holding the weightmovably in the axial direction of the shaft portion with the hole andincludes weight holding portion moving means (device) for moving theweight holding portion up and down.

The load adjusting means (device) moves the weight holding portiondownward with the weight holding portion moving means from a position inwhich the lower end of the shaft portion of the weight held by theweight holding portion at the bottom stage is located above the sliderholder without contacting the slider holder to load the slider holderwith the weights held by the weight holding portions in the form of aplurality of stages sequentially from the bottom stage.

In the first load applying apparatus according to the invention, theload adjusting means (device) applies a load originating from theplurality of weights to the slider holder in a stepwise manner to adjustthe load applied to the slider holder.

The weights of the first load applying apparatus according to theinvention are constituted by, for example, one or more blocks having apredetermined weight.

In the first load applying apparatus according to the invention, aspiral (helical) groove may be formed on at least either the outercircumferential surface the shaft portions of the weights or the innercircumferential surface of the holes of the weight holding portions.

A second slider processing apparatus according to the invention is anapparatus for lapping an edge of a slider having a surface to face amedium to chamfer the edge, comprising:

a slider holder for holding a slider;

a lapping member for lapping an edge of the slider held by the sliderholder;

load applying means (apparatus) for applying a load to the slider holderso as to urge the slider held by the slider holder against the lappingmember; and

moving means (device) for moving the slider held by the slider holderand the lapping member relative to each other such that the edge of theslider is lapped by the lapping member.

The load applying means (apparatus) has:

a weight including a shaft portion which can be put into contact withthe slider holder at the lower end thereof and a large diameter portiongreater in the diameter than the shaft portion;

a weight holding portion formed with a hole which allows the shaftportion of the weight to pass therethrough and which disallows thelarge-diameter portion to pass therethrough for holding the weightmovably in the axial direction of the shaft portion of the weight withthe hole; and

weight holing portion moving means (device) for moving the weightholding portion up and down.

A spiral groove is formed on at least either the outer circumferentialsurface of the shaft portion of the weight or the inner circumferentialsurface of the hole of the weight holding portion.

In the second slider processing apparatus according to the invention,the weight holding portion can be moved up and down with the weightholding portion moving means (device) to select a state in which thelower end of the shaft portion of the weight does not contact with theslider holder and no load is therefore applied by the weight to theslider holder or a state in which the lower end of the shaft portion ofthe weight contacts the slider holder to apply a load originating fromthe weight to the slider. In this slider processing apparatus, chips(particles) generated by friction between the shaft portion of theweight and the hole of the weight holding portion are collected by thespiral groove formed on at least either the outer circumferentialsurface of the shaft portion of the weight or the inner circumferentialsurface of the hole of the weight holding portion to maintain a smoothoperation of the shaft portion.

In the second slider processing apparatus according to the invention,for example, a plurality of the weight holding portions may be providedin the form of stages to hold a plurality of weights, and the loadapplying means (apparatus) may move the weight holding portions downwardwith the weight holding portion moving means (device) from a state inwhich the lower end of the weight held by the weight holding portion atthe bottom stage is located above the slider holder without contactingthe slider holder to load the slider holder with the weights held by theweight holding portions in the form of a plurality of stagessequentially from the bottom stage.

For example, the weights of the second slider processing apparatusaccording to the invention comprise one or more blocks having apredetermined weight.

Similarly to the first load applying apparatus, a second load applyingapparatus for processing a slider is an apparatus for applying a load toa slider holder so as to urge a slider held by the slider holder againsta lapping member, comprising:

a weight including a shaft portion which can be put into contact withthe slider holder at the lower end thereof and a large diameter portiongreater in the diameter than the shaft portion;

a weight holding portion formed with a hole which allows the shaftportion of the weight to pass therethrough and which disallows thelarge-diameter portion to pass therethrough, for holding the weightmovably in the axial direction of the shaft portion of the weight withthe hole; and

weight holing portion moving means (device) for moving the weightholding portion up and down.

A spiral groove is formed on at least either the outer circumferentialsurface of the shaft portion of the weight or the inner circumferentialsurface of the hole of the weight holding portion.

Like the second processing apparatus according to the invention, in thissecond load applying apparatus, chips (particles) generated by frictionbetween the shaft portion of the weight and the hole of the weightholding portion are collected by the spiral groove formed on at leasteither the outer circumferential surface of the shaft portion of theweight or the inner circumferential surface of the hole of the weightholding portion to maintain a smooth operation of the shaft portion.

For example, the weight of the second load applying apparatus accordingto the invention comprises one or more blocks having a predeterminedweight.

A third slider processing apparatus according to the invention is anapparatus for lapping edges of a slider having

a surface to face a medium to chamfer the edges, comprising:

a slider holder for holding a slider;

a lapping member having a lapping surface for lapping an edge of theslider held by the slider holder;

a positioning device for positioning the slider holder such that theslider contacts the lapping member with a surface of the slider to facea medium inclined relative to the lapping surface of the lapping member;and

moving means (device) for moving the slider held by the slider holderand the lapping member relative to each other such that the edge of theslider is lapped by the lapping member.

In the third processing apparatus according to the invention, the sliderholder is positioned by the positioning device such that the slidercontacts the lapping member with a surface of the slider to face amedium inclined relative to the lapping surface of the lapping member.

In the third processing apparatus, for example, the slider may include aplurality of edges having steps, and the lapping member may haveflexibility. The processing apparatus may further have transformingmeans (device) for transforming the lapping member such that theplurality of edges having steps of the slider are simultaneously lappedby the lapping member.

A second method for processing a slider according to the invention is amethod for lapping an edge of a slider having a surface to face a mediumto chamfer the edge, including the steps of:

putting a slider in contact with a lapping member with a surface of theslider to face a medium inclined relative to a lapping surface of thelapping member for lapping an edge of the slider; and

moving the slider and the lapping member relative to each other in astate in which the slider is in contact with the lapping member with thesurface of the slider to face a medium inclined relative to the lappingsurface of the lapping member to lap a predetermined edge of the sliderwith the lapping member.

In the second processing method according to the invention, for example,the slider may include a plurality of edges having steps, and thelapping member may have flexibility. The lapping step may simultaneouslylap a plurality of edges having steps of a slider by transforming thelapping member.

A third method for processing a slider according to the invention is amethod for lapping an edge of a slider having a surface to face a mediumto chamfer the edge, including:

a first lapping step for lapping a part of an edge of a slider incontact a the lapping member while moving the slider and the lappingmember relative to each other in a state in which the slider is incontact with the lapping member with a surface of the slider to face amedium inclined relative to a lapping surface of the lapping member; and

a second lapping step for lapping a part of an edge of the slider incontact with the lapping member while moving the slider and the lappingmember relative to each other in a state in which the slider is incontact with the lapping member with the surface of the slider to face amedium in parallel with the lapping surface of the lapping member.

In the third method for processing according to the invention, forexample, the slider may include a plurality of edges having steps; thelapping member may have flexibility; and the first lapping step maysimultaneously lap the plurality of edges having steps of the sliderwith the lapping member by transforming the lapping member. The secondlapping step may lap the plurality of edges having steps of the sliderwith the lapping member by transforming the lapping member. For example,the slider may include a plurality of edges having steps, and the firstlapping step may include the steps of lapping the edges of the sliderwith the lapping member without transforming the lapping member andsimultaneously lapping the plurality of edges having steps of the sliderwith the lapping member by transforming the lapping member havingflexibility. The first lapping step may chamfer at least a part of anedge in contact with the lapping member into a slanting surface, and thesecond lapping step may chamfer the edge chamfered into a slantingsurface at the first lapping step into a curved surface.

A first auxiliary device for processing a slider according to theinvention is a device for positioning a slider holder relative to alapping member, which is used in a slider processing apparatus having aslider holder, lapping member and moving means, for lapping an edge of aslider to chamfer the edge.

The first auxiliary device according to the invention comprises:

a main body located above the lapping member; and

a positioning portion formed on the main body for positioning the sliderholder such that a slider is put into contact with the lapping memberwith a surface of the slider to face a medium inclined relative to thelapping surface of the lapping member.

With the first auxiliary device according to the invention, the sliderholder is positioned by the positioning portion such that a slider isput into contact with the lapping member with a surface of the slider toface a medium inclined relative to the lapping surface of the lappingmember.

A fourth slider processing apparatus according to the invention is anapparatus for lapping edges of a slider including a plurality of edgeshaving steps and a surface to face a medium to chamfer the edges,comprising:

a slider holder for holding a slider;

a flexible lapping member for lapping edges of the slider held by theslider holder;

a transforming device for transforming the lapping member such that theplurality of edges having steps of the slider are simultaneously lappedby the lapping member, having a main body located opposite to the sliderheld by the slider holder with the lapping member sandwichedtherebetween and a wire wound around the outer circumference of the mainbody for transforming the lapping member; and

moving means (device) for moving the slider held by the slider holderand the lapping member relative to each other such that the edges of theslider is lapped by the lapping member.

In the fourth slider processing apparatus according to the invention,the lapping member is transformed by the wire of the transformingdevice, and a plurality of edges having steps of a slider aresimultaneously lapped by the lapping member. The tension of the wire isstable because it is wound around the outer circumference of the mainbody.

The transforming device of the fourth slider processing apparatusaccording to the invention may further have an elastic member orprojection provided under a part of the wire located on the uppersurface of the transforming device.

A second auxiliary device for processing a slider according to theinvention is used in a slider processing apparatus having the sliderholder, lapping member and moving means like the fourth processingapparatus, for lapping edges of a slider to chamfer the edges andcomprises:

a main body located in a position opposite to a slider held by theslider holder with the lapping member sandwiched therebetween; and

a wire wound around the outer circumference of the main body fortransforming the lapping member such that a plurality of edges havingsteps of the slider are simultaneously lapped by the lapping member.

With the second auxiliary device according to the invention, the lappingmember is transformed by the wire, and a plurality of edges having stepsof a slider are simultaneously lapped by the transformed lapping member.The tension of the wire is stable because it is wound around the outercircumference of the main body.

The second auxiliary device according to the invention may further havean elastic member or projection provided under a part of the wirelocated on the upper surface of the auxiliary device for processing aslider.

Other objects, features and advantages of the invention will becomeclear enough from the following description.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a partially cutaway front view of a slider processingapparatus according to an embodiment of the invention.

FIG. 2 is a right side view of the apparatus in FIG. 1.

FIG. 3 is an enlarged front view of the apparatus in FIG. 1 showing theneighborhood of an X-Y table.

FIG. 4 is a right side view of the region shown in FIG. 3.

FIG. 5 is a front view of a Y-direction swing width adjusting member inFIG. 1.

FIG. 6 is a side view of the member shown in FIG. 5.

FIG. 7 is a front view of the Y-direction swing width adjusting memberin FIG. 1.

FIG. 8 is a side view of the member shown in FIG. 7.

FIG. 9 illustrates a movement of a slider holding jig setting plate inFIG. 2.

FIG. 10 illustrates a sensor for detecting the presence or absence ofthe slider holding jig setting plate shown in FIG. 9.

FIG. 11 is a side view of a wire winding block in FIG.

FIG. 12 is a front view of the wire winding block in FIG. 1.

FIG. 13 is a perspective view showing an elastic member used in the wirewinding block shown in FIG. 11.

FIG. 14 is a perspective view showing a transforming member used for thewire winding block shown in FIG. 11.

FIG. 15 is a perspective view showing the wire winding block shown inFIG. 11 and a rubber sheet and a diamond lapping sheet provided thereon.

FIG. 16 is a front view showing a plate used in place of the wirewinding block shown in FIG. 11 and a rubber sheet provided thereon.

FIG. 17 illustrates an example of a method for providing a rubber sheetand a diamond lapping sheet on the wire winding block shown in FIG. 11.

FIG. 18 is a plan view showing a state wherein a rubber sheet and adiamond lapping sheet are stretched on the wire winding block accordingto the method illustrated in FIG. 17.

FIG. 19 is a front view of the state shown in FIG. 18.

FIG. 20 is a plan view of a slider holding jig setting plate used in aprocessing apparatus according to an embodiment of the invention.

FIG. 21 is a sectional view taken along the line 21—21 in FIG. 20.

FIG. 22 is a plan view of another slider holding jig setting plate usedin a processing apparatus according to an embodiment of the invention.

FIG. 23 is a sectional view taken along the line 23—23 in FIG. 22.

FIG. 24 is a perspective view of an example of a slider processed by aprocessing apparatus according to an embodiment of the invention.

FIG. 25 is a sectional view showing the neighborhood of the sliderduring the processing performed by the processing apparatus according tothe embodiment of the invention.

FIG. 26 is an enlarged illustration of the region C in FIG. 25.

FIG. 27 is a sectional view of a load applying portion in FIG. 1 takenfrom the front side thereof.

FIG. 28 is a sectional view of the load applying portion in FIG. 1 takenfrom a side thereof.

FIG. 29 is a sectional view of a weight holder shown in FIG. 28 withspiral grooves formed on the holes thereof.

FIG. 30 is a sectional view showing the operation of a load applyingportion in FIG. 1.

FIG. 31 is a sectional view showing the operation of the load applyingportion in FIG. 1.

FIG. 32 is a sectional view showing the operation of the load applyingportion in FIG. 1.

FIG. 33 is a sectional view showing the operation of the load applyingportion in FIG. 1.

FIG. 34 is a sectional view illustrating a first step of chamfering of aprocessing method according to an embodiment of the invention.

FIG. 35 is a sectional view illustrating a second step of chamfering ofthe processing method according to the embodiment of the invention.

FIG. 36 is a sectional view illustrating a third step of chamfering ofthe processing method according to the embodiment of the invention.

FIG. 37 is a sectional view illustrating another method for chamferingpresented for comparison with the processing method according to theembodiment of the invention.

FIG. 38 is a sectional view illustrating still another method forchamfering presented for comparison with the processing method accordingto the embodiment of the invention.

FIG. 39 illustrates an example of the shape of an edge of a slider at anair inflow side thereof which has been chamfered according to the methodshown in FIGS. 37 or 38.

FIG. 40 illustrates an example of the shape of an edge of a slider at anair inflow side thereof which has been chamfered in three stepsaccording to an embodiment of the invention.

FIG. 41 illustrates a slider holding jig according to an embodiment ofthe invention wherein a lateral wall of the slider holding jig and alapping surface of a diamond lapping sheet define an angle of 60°.

FIG. 42 illustrates an example of the shape of an edge after the secondstep of chamfering in the case shown in FIG. 41.

FIG. 43 illustrates an example of the shape of the edge after the thirdstep of chamfering in the case shown in FIG. 41.

FIG. 44 illustrates a slider holding jig according to an embodiment ofthe invention wherein a lateral wall of the slider holding jig and alapping surface of a diamond lapping sheet define an angle of 75°.

FIG. 45 illustrates an example of the shape of an edge after the secondstep of chamfering in the case shown in FIG. 44.

FIG. 46 illustrates an example of the shape of the edge after the thirdstep of chamfering in the case shown in FIG. 44.

FIG. 47 is a perspective view showing an example of a configuration of aslider.

FIG. 48 schematically illustrates a method for chamfering a slideraccording to the related art.

FIG. 49 is an enlarged illustration of a region C in the vicinity ofedges of rail portions which have been chamfered according to the methodshown in FIG. 48.

FIG. 50 illustrates a mode of inclination of a slider.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENT

A preferred embodiment of the invention will now be described withreference to the drawings.

FIG. 1 is a partially cutaway front view of a slider processingapparatus according to an embodiment of the invention. FIG. 2 is a rightside view of the apparatus shown in FIG. 1. FIG. 3 is an enlarged frontview of the apparatus in FIG. 1 showing the neighborhood of an X-Ytable. FIG. 4 is a right side view of the region shown in FIG. 3. Aprocessing apparatus 10 according to the present embodiment is anapparatus for lapping an edge of a slider to chamfer the edge. Thepresent embodiment will refer to an example of a slider used for a thinfilm magnetic head.

The processing apparatus 10 has an apparatus main body 11. An operationpanel 23 is provided on the front end thereof. A base portion 12 isprovided on the apparatus main body 11. There is provided an X-Y table13 whose top surface can be moved in an X-direction (the horizontaldirection indicated by the arrow in FIG. 1) and a Y-direction (thehorizontal direction indicated by the arrow in FIG. 2) on the baseportion 12. The X-Y table 13 corresponds to the moving means (device)according to the invention.

The X-Y table 13 has a fixed plate 14 fixed to the base portion 12, aY-direction swinging plate 15 provided on the fixed plate 14, a plate 16fixed on the Y-direction swinging plate 15, an X-direction swingingplate 17 provided on the plate 16 and a plate 18 provided on theX-direction swinging plate 17.

As shown in FIG. 3, guides 19 with a bearing extending in theY-direction are provided at both ends of the top surface of the fixedplate 14 in the X-direction. Engaging portions 20 extending in theY-direction in movable engagement with the guides 19 provided on thefixed plate 14 are provided on both ends of the bottom surface of theY-direction swinging plate 15 in the X-direction. The Y-directionswinging plate 15 is moved in the Y-direction when the engaging portions20 move along the guides 19 on the fixed plate 14.

As shown in FIG. 4, guides 21 with a bearing extending in theX-direction are provided at both ends of the top surface of the plate 16in the Y-direction. Engaging portions 22 extending in the X-direction inengagement with the guides 21 provided on the plate 16 are provided onboth ends of the bottom surface of the X-direction swinging plate 17 inthe Y-direction. The X-direction swinging plate 17 is moved in theX-direction when the engaging portions 22 move along the guides 21 onthe plate 16.

A plurality of wire winding blocks 30 are secured on the plate 18. Thewire winding blocks 30 correspond to the transforming device orauxiliary device for processing a slider according to the invention. Aconfiguration of the wire winding blocks 30 will be described later indetail.

As shown in FIG. 3, a Y-direction swinging motor 40 is provided in theapparatus main body 11. A disc 42 is attached to a rotating shaft 41 ofthe Y-direction swinging motor 40 in the apparatus main body 11. A swingorigin sensor 43 is provided in the apparatus main body 11 such that itsandwiches the disc 42. For example, a hole is provided in apredetermined location of the disc 42, and a transmission typephoto-sensor incorporating an amplifier is used as the swing originsensor 43. In this case, the swing origin sensor 43 detects the positionof the hole of the disc 42 to detect an origin of a swing in theY-direction.

A rotating shaft 45 for a swing in the Y-direction is coupled to theupper end of the rotating shaft 41 of the Y-direction swinging motor 40through a Y-direction swing width adjusting member 44 in a positionhigher than the top surface of the base portion 12. The Y-directionswing width adjusting member 44 is capable of offsetting the rotatingshaft 41 of the Y-direction swinging motor 40 and the Y-directionswinging rotating shaft 45 and capable of adjusting the offset. A cam 46having a bearing is attached to the upper end of the Y-directionswinging rotating shaft 45. A guide 47 extending in the X-direction forguiding the cam 46 is provided on the top surface of the Y-directionswinging plate 15. When the rotating shaft 41 of the Y-directionswinging motor 40 and the rotating shaft 45 for a swing in theY-direction are offset, the cam 46 is rotating by a rotation of theY-direction swinging motor 40, and a movement of the cam 46 along theguide 47 swings the guide 47, plate 16 and Y-direction swinging plate 15in the Y-direction. The base portion 12, fixed plate 14, Y-directionswinging plate 15 and plate 16 are formed with a hole through which theY-direction swinging rotating shaft 45 is inserted.

An X-direction swinging motor 50 is provided in the apparatus main body11. A disc 52 is attached to a rotating shaft 51 of the Y-directionswinging motor 50 in the apparatus main body 11. A swing origin sensor53 is provided in the apparatus main body 11 such that it sandwiches thedisc 52. For example, a hole is provided in a predetermined location ofthe disc 52, and a transmission type photo-sensor incorporating anamplifier is used as the swing origin sensor 53. In this case, the swingorigin sensor 53 detects the position of the hole of the disc 52 todetect an origin of a swing in the X-direction.

According to the present embodiment, the origins of swings in the Y- andX-directions are detected by the swing origin sensors 43 and 53 toreturn the position of the X-Y table 13 to an origin of swinging, whichalways keeps the position of X-Y table 13 constant when processing isstarted. This eliminates any variation of results of processing.

A rotating shaft 55 for a swing in the X-direction is coupled to theupper end of the rotating shaft 51 of the X-direction swinging motor 50through an X-direction swing width adjusting member 54 in a positionhigher than the top surface of the base portion 12. The X-directionswing width adjusting member 54 is capable of offsetting the rotatingshaft 51 of the X-direction swinging motor 50 and the X-directionswinging rotating shaft 55 and capable of adjusting the offset. A cam 56having a bearing is attached to the upper end of the X-directionswinging rotating shaft 55. A guide 57 extending in the Y-direction forguiding the cam 56 is provided on the bottom surface of the X-directionswinging plate 17. When the rotating shaft 51 of the X-directionswinging motor 50 and the rotating shaft 55 for a swing in theX-direction are offset, the cam 56 is rotating by a rotation of theX-direction swinging motor 50, and a movement of the cam 56 along theguide 57 swings the guide 57, X-direction swinging plate 17 and plate 18in the X-direction. The base portion 12, fixed plate 14, Y-directionswinging plate 15 and plate 16 are formed with a hole through which theX-direction swinging rotating shaft 55 is inserted.

A configuration and operation of the Y-direction swing width adjustingmember 44 will now be described with reference to FIGS. 5 through 8.FIG. 5 is a front view of the Y-direction swing width adjusting member44 taken when the offset between the rotating shaft 41 of theY-direction swinging motor 40 and the Y-direction swinging rotatingshaft 45 is zero, and FIG. 6 is a side view of the member shown in FIG.5. FIG. 7 is a front view of the Y-direction swing width adjustingmember 44 when the offset between the rotating shaft 41 of theY-direction swinging motor 40 and the Y-direction swinging rotatingshaft 45 is a predetermined quantity greater than zero, and FIG. 8 is aside view of the member shown in FIG. 7.

The Y-direction swing width adjusting member 44 is equipped with a fixedportion 61 fixed to the upper end of the rotating shaft 41 of theY-direction swinging motor 40 and having a groove extending in onedirection, a movable portion 62 movably contained in the groove of thefixed portion 61 and fixed to the lower end of the Y-direction swingingrotating shaft 45, a driving screw 63 attached to a side of the fixedportion 61 for moving the movable portion 62 relative to the fixedportion 61 and a fixing screw 64 attached to another side of the fixedportion 61 for fixing the movable portion 62 to the fixed portion 61.

With the Y-direction swing width adjusting member 44, the movableportion 62 can be moved relative to the fixed portion 61 by rotating thedriving screw 63 and the movable portion 62 can be fixed to the fixedportion 61 by fastening the fixing screw 64.

When the Y-direction swinging motor 40 is driven with zero offsetbetween the rotating shaft 41 of the Y-direction swinging motor 40 andthe Y-direction swinging rotating shaft 45 as shown in FIGS. 5 and 6,the Y-direction swing width adjusting member 44 causes the Y-directionswinging rotating shaft 45 to only rotate and remain in the sameposition. Therefore, the resulting swing width of the Y-directionswinging plate 15 is zero.

When the Y-direction swinging motor 40 is driven with an offset of apredetermined quantity greater than zero between the rotating shaft 41of the Y-direction swinging motor 40 and the Y-direction swingingrotating shaft 45 as shown in FIGS. 7 and 8, the Y-direction swing widthadjusting member 44 causes the Y-direction swinging rotating shaft 45 torotate eccentrically to the rotating shaft 41, which consequently causesthe Y-direction swinging plate 15 to swing. In this case, the swingwidth of the Y-direction swinging plate 15 is twice the offset betweenthe rotating shaft 41 and the Y-direction swinging rotating shaft 45.

The configuration and operation of the X-direction swing width adjustingmember 54 are the same as those of the Y-direction swing width adjustingmember 44.

In the present embodiment, the speed of rotation of the Y-directionswinging motor 40 is controlled within a range from 0 to 40 rpm, and thespeed of rotation of the X-direction swinging motor 50 is controlledwithin a range from 0 to 30 rpm.

In the present embodiment, the swing width of the Y-direction swingingplate 15 is controlled within a range from 0 to 15 mm, and the swingwidth of the X-direction swinging plate 17 is controlled within a rangefrom 0 to 30 mm.

As shown in FIG. 1, two rail portions 29 extending in the Y-directionare secured on the base portion 12 in positions on both sides of the X-Ytable 13 in the horizontal direction thereof. A guide 71 extending inthe Y-direction is provided on each of the rail portions 29.

A slider holding jig setting plate 70 is provided above the X-Y table13. The slider holding jig setting plate 70 is provided to position aslider holding jig 80 for holding a slider. The slider holding settingplate 70 corresponds to the positioning device or auxiliary device forprocessing a slider according to the invention. The slider holding jig80 corresponds to the slider holder according to the invention. Engagingportions 72 to engage the guides 71 are provided on the bottom surfaceof the slider holding jig setting plate 70 in the vicinity of both endsthereof in the X-direction. A movement of the engaging portions 72 alongthe guides 71 causes the slider holding jig setting plate 70 to move inthe Y-direction. The slider holding jig setting plate 70 is located in aposition above the X-Y table 13 when it is moved forward to theextremity and is retracted from the position above the X-Y table 13 bymoving it backward from that state.

FIG. 9 illustrates a movement of the slider holding jig setting plate70. A stopper 75 is provided in a position that corresponds to the rearend of the slider holding jig setting plate 70 when the slider holdingjig setting plate 70 is located at the backward extremity (right side inFIG. 9) to regulate the backward movement of the slider holding jigsetting plate 70.

FIG. 10 illustrates a sensor for detecting the presence or absence ofthe slider holding jig setting plate 70 in the position above the X-Ytable 13. As shown in FIG. 10, a sensor actuation piece 73 is providedat the forward end of the holding jig setting plate 70. In a positionthat corresponds to the forward end of the slider holding jig settingplate 70 when the slider holding jig setting plate 70 is located at theforward extremity, there is provided a slider holding jig setting platedetection sensor 74 for detecting the presence or absence of the sensoractuation piece 73 to detect the presence or absence of the sliderholding jig setting plate 70 in the position above the X-Y table 13. Forexample, a transmission type photo-sensor incorporating an amplifier isused as the sensor 74.

According to the present embodiment, processing can not be carried outuntil the slider holding jig setting plate detection sensor 74 detectsthat the slider holding jig setting plate 70 has been retracted from theposition above the X-Y table 13 and it is detected that the sliderholding jig setting plate 70 has been thereafter located in the positionabove the X-Y table 13. The purpose is to retract the slider holding jigsetting plate 70 from the position above the X-Y table 13 temporarilyeach time one cycle of processing is carried out to allow replacement ofa diamond lapping sheet to be described later.

As shown in FIG. 1, a slider holding jig detection sensor 75 is providedon the slider holding jig setting plate 70 to detect whether the sliderholding jig 80 is mounted on the slider holding jig setting plate 70 ornot. For example, the sensor 75 is a photo-sensor having a lightemitting portion and a light receiving portion provided in positionsopposite to each other with the slider holding jig 80 interposedtherebetween.

In the processing apparatus 10 of the present embodiment, the positionof the X-Y table 13 is returned to the origin of swinging after theabsence of the slider holding jig 80 is confirmed by the slider holdingjig detection sensor 75.

The processing apparatus 10 of the present embodiment is furtherequipped with a load applying portion 100 for applying a downward loadto a slider held by the slider holding jig 80, capable of adjusting themagnitude of the applied load. The load applying portion 100 correspondsto the load applying means (device) according to the invention. Aconfiguration of the load applying portion 100 will be described indetail later.

A configuration of the wire winding block 30 will now be described withreference to FIGS. 11 through 15. FIG. 11 is a side view of the wirewinding block 30. FIG. 12 is a front view of the wire winding block 30.FIG. 13 is a perspective view showing an elastic member used in the wirewinding block 30. FIG. 14 is a perspective view showing a transformingmember used for the wire winding block 30.

As shown in FIGS. 11 and 12, the wire winding block 30 has a block mainbody 31. The block main body 31 is formed with a rectangular recess 31 awhich is open on the top surface thereof. The recess 31 a is adapted tocontain a rectangular elastic member 32 as shown in FIG. 13 or atransforming member 33 as shown in FIG. 14. For example, the elasticmember 32 is formed of silicone rubber. The top surface of the elasticmember 32 is flush with the top surface of the block main body 31 whencontained in the recess 31 a. On the top surface of the transformingmember 33, there is formed a plurality of projections 33 a extending ina direction perpendicular to the longitudinal direction of thetransforming member 33. Each of the projections 33 a has a rectangularsectional configuration. For example, the transforming member 33 isformed of stainless steel. The top surface of the projections 33 a isflush with the top surface of the block main body 31 when thetransforming member 33 is contained in the recess 31 a.

A wire 34 is wound in a plurality of turns around the outercircumference of the block main body 31 containing the elastic member 32or transforming member 33 in the recess 31 a thereof. The ends of thewire 34 are secured to the block main body 31 with wire locking screws35 in the vicinity of both ends of the block main body 31 in thelongitudinal direction thereof. When the transforming member 33 iscontained in the recess 31 a, a part of the wire 34 located on the uppersurface of the wire winding block 30 is located above the projections 33a of the transforming member 33.

Holes 36 for inserting the locking screws are formed in the vicinity ofboth ends of the block main body 31 in the longitudinal directionthereof. As shown in FIGS. 3 and 4, the wire winding blocks 30 aresecured to the plate 18 with locking screws 37 inserted through theholes 36 for the locking screws.

FIG. 15 is a perspective view showing a wire winding block 30 and arubber sheet and a diamond lapping sheet provided thereon. While thewire winding block 30 illustrated in FIG. 15 contains the transformingmember 33 in the recess 31 a of the block main body 31, the elasticmember 32 may alternatively be contained in the recess 31 a. A rubbersheet 38 is provided on the wire winding block 30, and a diamond lappingsheet 39 is provided on the rubber sheet 38. For example, the rubbersheet 38 is formed of silicone rubber. The diamond lapping sheet 39corresponds to the lapping member according to the invention.

In the processing apparatus 10 according to the present embodiment, aplate 90 is used instead of the wire winding blocks 30 depending on thepurpose. For example, the plate 90 is formed of stainless steel. Whenthe plate 90 is used, the plate 90 is provided on the plate 18; therubber sheet 38 is provided on the plate 90; and the diamond lappingsheet 39 as shown in FIG. 15 is provided on the rubber sheet 38.

A description will now be made with reference to FIGS. 17 through 19 onan example of a method for providing the rubber sheet 38 and diamondlapping sheet 39 on the wire winding blocks 30. As shown in FIG. 17, aplurality of wire winding blocks 30 are secured on the plate 18. Therubber sheet 38 is provided such that it covers all of the wire windingblocks 30. In the example shown in FIG. 17, when the diamond lappingsheet 39 is provided on the rubber sheet 38, the diamond lapping sheet39 is first placed on a piece of ground paper 91. At this time, an edgeof the diamond lapping sheet 39 must slightly protrude from an edge ofthe ground paper 91. Next, the part of the diamond lapping sheet 39protruding from the edge of the ground paper 91 is aligned with an edgeof the region of the rubber sheet 38 where the diamond lapping sheet 39is to be provided, and the diamond lapping sheet 39 is then stretched onthe rubber sheet 38 as the ground paper 91 is pulled in the directionindicated by the arrow 92 with said part held by a hand.

FIG. 18 is a plan view showing a state wherein the diamond lapping sheet39 has been stretched on the rubber sheet 38, and FIG. 19 is a frontview of the same state. As shown in FIG. 18, the processing apparatus 10of the present embodiment is provided with ten wire winding blocks 30 intotal forming an array of five blocks in the X-direction (horizontaldirection indicated by the arrow in FIG. 18) by two blocks in theY-direction (vertical direction indicated by the arrow in FIG. 18). Thewires 34 are arranged in the X-direction.

The slider holding jig setting plate 70 will now be described withreference to FIGS. 20 through 23. Two types of slider holding jigsetting plates 70 are prepared for the processing apparatus 10 of thepresent embodiment. Hereinafter, a slider holding jig setting plate of afirst type is represented by a reference number 70A, and a sliderholding jig setting plate of a second type is represented by a referencenumber 70B. The reference number 70 represents both of the two types ofslider holding jig setting plates 70A and 70B.

FIG. 20 is a plan view of the first type of slider holding jig settingplate 70A, and FIG. 21 is a sectional view taken along the line 21—21 inFIG. 20. As shown in those figures, the slider holding jig setting plate70A has a main body 70 a in the form of a plate provided above thediamond lapping sheet 39 without contacting the same. The main body 70 ais formed with ten holes 76A through which the slider holding jig 80 isinserted. The ten holes 76A are provided in a positional relationshipwith each other similar to that of the ten wire winding blocks 30 shownin FIG. 18. As shown in FIG. 21, the holes 76A are at a predeterminedangle to the vertical. Therefore, the holes 76A position the sliderholding jig 80 such that a slider is in contact with the diamond lappingsheet 39 with a surface of the slider to face a medium inclined relativeto the lapping surface of the diamond lapping sheet 39. The holes 76Acorrespond to the positioning portion according to the invention.

FIG. 22 is a plan view of the second type of slider holding jig settingplate 70B, and FIG. 23 is a sectional view taken along the line 23—23 inFIG. 22. As shown in those figures, the slider holding jig setting plate70B has a main body 70 b in the form of a plate provided above thediamond lapping sheet 39 without contacting the same. The main body 70 bis formed with ten holes 76B through which the slider holding jig 80 isinserted. The ten holes 76B are provided in a positional relationshipwith each other similar to that of the ten wire winding blocks 30 shownin FIG. 18. As shown in FIG. 23, the holes 76B extend in the verticaldirection. Therefore, the holes 76B position the slider holding jig 80such that a slider is in contact with the diamond lapping sheet 39 witha surface of the slider to face a medium in parallel with the lappingsurface of the diamond lapping sheet 39.

Both of the main bodies 70 a and 70 b of the slider holding jig settingplates 70A and 70B are formed with a plurality of screw holes 77 throughwhich screws are inserted to secure the plates 70A and 70B to theengaging portions 72 shown in FIGS. 1 and 2. Both of the main bodies 70a and 70 b of the slider holding jig setting plates 70A and 70B areformed with screw holes 78 through which screws are inserted to mountthe slider holding jig detection sensor 75.

A description will now be made with reference to FIG. 24 on an exampleof a slider processed by the processing apparatus 10 of the presentembodiment. The illustrated slider 150 is used in a thin film magnetichead. It has rail portions whose surfaces are to face a medium (airbearing surfaces), and the rail portions are formed such that outerlateral walls of the rail portions are located inside lateral walls ofthe slider 150.

Further, the slider 150 is a negative pressure slider having two railportions 153 whose surfaces are to face a medium. The rail portions 153are formed such that outer lateral walls 154 of the rail portions 153are located inside lateral walls 152 of the slider 150 or cut portionsof a bar with a predetermined distance therebetween.

Referring to FIG. 24, a reference number 166 represents the direction ofair flow during the operation. The surface of the slider 150 on the sidethereof where air flows in is hereinafter referred to as “inflow sideend face LE”, and the surface on the side thereof where air flows out ishereinafter referred to as “outflow side end face TR”. The “lateralwalls” are the surfaces which are formed to extend in the direction inwhich air flows and which cross the inflow side end face LE, outflowside end face TR and the surfaces to face a medium. In most cases, theinflow side end face LE, outflow side end face TR, surfaces to face amedium and lateral walls are perpendicular to each other. In the slider150 shown in FIG. 24, the outer laterals 154 of the rail portions 153are the two lateral walls closest to the slider lateral walls 152 amongthe lateral walls of the rail portions 153.

A negative pressure generating portion 155 in the form of a recess isdefined between the two rail portions 153. The width of the railportions 153 is not uniform across the air inflow side and the airoutflow side thereof. The width is largest at the air inflow side,medium at the air outflow side and smallest in the intermediate region.

In the vicinity of the ends of the rail portions 153 on the air inflowside thereof, there is provided taper portions 160 whose heightdecreases toward those ends. At the end of the slider 150 on the airoutflow side thereof, there is formed a magnetic head element 157 and aterminal 158 connected to the magnetic head element 157. The height ofthe rail portions 153 (the depth of the negative pressure generatingportion 155) of such a slider 150 is on the order of several μm (e.g.,0.5 to 5 μm). The distance between the lateral walls 152 of the slider150 and the outer lateral walls 154 of the rail portions 153 is on theorder of several tens μm (e.g., 10 to 60 μm).

A major part indicated by a reference number 150 a of the slider 150shown in 24 is formed of, for example, aluminum oxide and titaniumcarbide (Al₂O₃.TiC), and a part of the same indicated by a referencenumber 150 b is formed of alumina (Al₂O₃) so as to surround the magnetichead element 157 and terminal 158.

The relationship between the wire winding blocks 30 and the slider 150will now be described with reference to FIGS. 25 and 26. FIG. 25illustrates the neighborhood of the slider 150 under processing. FIG. 26is an enlarged view of the region C in FIG. 25. FIG. 25 shows an examplewherein wire winding blocks 30 containing the transforming member 33 inthe recess 31 a of the block main body 31 are used. FIG. 25 shows onlythe transforming member 33 and wire 34 of such a wire winding block 30.

As shown in FIG. 25, a plurality of slider fixing portions 80 a areprovided at the lower end of the slider holding jig 80, and a slider 150to be processed is secured to each of the slider fixing portions 80 a bymeans of, for example, bonding.

The wire 34 provided on the projections 33 a of the transforming member33 is provided in positions corresponding to positions where theindividual sliders 150 are separated. As shown in FIG. 26, the positionswhere the individual sliders 150 are separated are positionscorresponding to first edges 161 defined by the surfaces to face amedium of the rail portions 153 of the sliders 150 fixed to the sliderholding jig 80 and the outer lateral walls 154 of the rail portions andpositions corresponding to second edges 162 defined by the lateral walls152 of the sliders 150 and the surfaces 159 toward a recording medium(magnetic disc) of the sliders 150 perpendicular thereto. Therefore, therubber sheet 38 and diamond lapping sheet 39 provided on the wire 34 aretransformed such that parts thereof corresponding to the first edges 161and second edges 162 protrude toward the first edges 161 and secondedges 162. As a result, the diamond lapping sheet 39 are put intocontact with at least the first edges 161 and second edges 162.

The above-described action similarly occurs in a case wherein theelastic member 32 is contained in the recess 31 a of the block main body31. When the transforming member 33 is contained in the recess 31 a ofthe block member 31, the wire 34 can be moved more easily than in thecase where the recess 31 a contains the elastic member 32. Therefore,when the transforming member 33 is used as the member contained in therecess 31 a, even if there is some shift of the position where thesliders 150 are fixed to the slider holding jig 80, the wire 34 moves topositions corresponding to the separating position between theindividual sliders 150 because the rubber sheet 38 and diamond lappingsheet 39 raised by the wire 34 protrude into the separating positionsbetween the individual sliders 150. As a result, the diamond lappingsheet 39 evenly contacts two adjoining sliders 150, which allows uniformchamfering of the sliders 150.

The magnetic head element 157 is formed on the end of the slider 150 atthe air outflow side thereof. Therefore, the end of the slider 150 atthe air outflow side is preferably processed to a less degree even whenchamfered.

When the transforming member 33 is used as the member contained in therecess 31 a of the block main body 31, since the wire 34 is locatedabove the projections 33 a of the transforming member 33 and the rubbersheet 38 and diamond lapping sheet 39 are located on the wire 34, alarge gap is formed between the top surface of the transforming member33 and the rubber sheet 38 in the region between adjoining projections33 a. As a result, the diamond lapping sheet 39 contacts the sliders 150more softly in such regions between the adjoining projections 33 a. Itis therefore possible to suppress the degree of chamfering of edges ofthe slider 150 on the air outflow side thereof.

While the width and height of the projections 33 a of the transformingmember 33 s are appropriately set in accordance with the distance dbetween the adjoining sliders 150 fixed to the slider holding jig 80(hereinafter referred to as “separation widths”) and the like, the widthof the projections 33 a is preferably set within the range from 0.05 to0.20 mm, and the height of the projections 33 a is preferably set withinthe range from 0.10 to 0.50 mm. The separation width d, the width of theprojections 33 a and the height of the same in this case are exemplaryvalues of 0.2 mm, 0.15 mm and 0.40 mm, respectively.

For example, the wire 34 is formed of synthetic fiber such as Nylon(trade name), stainless steel and the like. While the outer diameter ofthe wire 34 is appropriately set in accordance with the separation widthd, it is preferably set within the range from 0.03 to 0.20 mm in thepresent embodiment. The outer diameter of the wire 34 is an exemplaryvalue of 0.09 mm in this case.

While the rubber sheet 38 preferably has hardness in the range from 30to 60, it is preferably softer, the greater the amount of lapping. Inthis case, the hardness of the rubber sheet 38 is an exemplary value of50. The thickness of the rubber sheet 38 is preferably in the range from0.10 to 0.30 mm. In this case, the thickness of the rubber sheet 38 isan exemplary value of 0.30 mm.

For example, the diamond lapping sheet 39 is provided by forming a layerof a lapping material on a flexible film. The flexible film is formedof, for example, polyethylene terephthalate (PET). For example, thelayer of a lapping material is formed by applying particles of diamondon the flexible film along with a binder and by drying the samethereafter. Here, the grain size of the diamond particles is anexemplary value of 0.25 μm. The thickness of the flexible film ispreferably in the range from 0 to 6 μm. The thickness 0 μm of theflexible film means a case where the diamond lapping sheet 39 is formedof diamond particles and a binder using no flexible film. Here, thethickness of the flexible film is an exemplary value of 4 μm or 2 μm.

The swing width of the X-Y table 13 in the Y-direction is preferablygreater than the swing width in the X-direction. When the separationwidth d and the outer diameter of the wire 34 are respectively set at0.2 mm and 0.09 mm as described above, the swing width in theX-direction is preferably in the range from 1 to 5 mm, and the swingwidth in the Y-direction is preferably in the range from 0.05 to 0.15mm. Here, the swing width in the X- and Y-directions are exemplaryvalues of 3 mm and 0.08 mm, respectively.

In the processing apparatus 10 of the present embodiment, a plurality ofwire winding blocks 30 are provided on the plate 18. Alternatively, onelarge elastic member or transforming member may be secured on the plate18 and a wire may be provided on the elastic member or transformingmember with both ends thereof secured to the ends of the plate 18. Insuch a configuration, however, the tension of the wire can be unstableand processing accuracy can be consequently reduced.

According to the present embodiment, the tension of the wire 34 is morestable than in the above-described configuration because only a shortpart of the wire 34 is located on the top surface of each wire windingblock 30. The present embodiment therefore makes it possible to improveprocessing accuracy.

A configuration of the load applying portion 100 will now be describedwith reference to FIGS. 27 and 28. FIG. 27 is a sectional view of theload applying portion 100 taken from the front side thereof. FIG. 28 isa sectional view of the load applying portion 100 taken from a sidethereof. As shown in those figures, the load applying portion 100 has aweight holding plate 110 at a first stage, two frames 111 formed only bylateral walls secured on the weight holding plate 110, two weightholding plates 120 at a second stage secured on the respective frames111, two frames 121 formed only by lateral walls secured on therespective weight holding plates 120, two weight holding plates 130 at athird stage secured on the respective frames 121 and two covers 131having lateral and upper surfaces secured on the respective weightholding plates 130. The two each frames 111, weight holding plates 120,frames 121, weight holding plates 130 and covers 131 are arranged in afront-and-rear direction.

The weight holding plate 110 is formed with ten holes 112 having arectangular sectional configuration. The holes 112 are arranged in apositional relationship similar to that of the ten holes 76 of theslider holding jig setting plate 70 shown in FIG. 20 or 22. The weightholding plates 120 and 130 are respectively formed with holes 122 and132 having the same configuration as the holes 112 in positionscorresponding to the holes 112 of the weight holding plate 110. A weightholder 140 is mounted in each of the holes 112, 122 and 132. Each of theweight holders 140 is formed with three holes 141 having a circularsectional configuration extending in the vertical direction. The weightholding plates 110, 120 and 130 and the weight holders 140 correspond tothe weight holding portion according to the invention.

Three weights 113 are mounted to each of the weight holders 140 at thefirst stage. The weight 113 is constituted by a shaft member 114 in theform of an elongate column and a large diameter member 115 in the formof a column greater in the diameter than the shaft member 114 secured tothe upper end of the shaft member 114. The lower end face of the shaftmember 114 is in a spherical configuration. The large diameter member115 is formed with a recess having a circular section which is open onthe lower end face thereof, and the upper end of the shaft member 114 isinserted in the recess. The large diameter member 115 is screwed to theshaft member 114. The weights 113 thus formed by the shaft member 114and large diameter member 115 correspond to the blocks having apredetermined weight according to the invention. The block may have anyweight. That is, the weight may be varied appropriately depending on thepurpose and the like. For example, the weight is 25 g in the presentembodiment. The part of the shaft member 114 of the weight 113 at thefirst stage protruding from the lower end face of the large diametermember 115 constitutes a shaft portion 113 a, and the part located abovethe shaft portion 113 a constitutes a large diameter portion 113 b.Therefore, the weight holder 140 holds the weight 113 by allowing theshaft portion 113 a of the weight 113 to pass therethrough anddisallowing the large diameter portion 113 b to pass therethrough.

Three weights 123 are mounted to each of the weight holders 140 at thesecond stage. The weight 123 is constituted by a shaft member 124 in theform of an elongate column, a flange member 125 screwed to the middle ofthe shaft member 124 and one or more load adjusting blocks 126 attachedto a part of the shaft member 124 higher than the flange member 125. Thelower end face of the shaft member 124 is in a spherical configuration.The outer diameter of the flange member 125 is greater than the outerdiameter of the shaft member 124. The outer diameter of the loadadjusting blocks 126 is equal to the outer diameter of the flange member125. Each of the load adjusting blocks 126 is formed with a hole throughwhich the shaft member 124 can be inserted. By inserting the shaftmember 124 into the hole, the plurality of load adjusting blocks 126 canbe stacked on the flange member 125. In this case, up to four loadadjusting blocks 126 can be stacked.

The combination of the shaft member 124 and flange member 125 of theweight 123 at the second stage corresponds to the block having apredetermined weight according to the invention, and the weight of thesame is, for example, 25 g. Each of the load adjusting blocks 126 alsocorresponds to the block having a predetermined weight according to theinvention and, for example, it weighs 25 g. Therefore, by changing thenumber of the load adjusting blocks 126, the weight of a weight 123 as awhole can be varied within the range from 25 g to 125 g, 25 g being oneincrement or decrement.

The uppermost load adjusting block 126 of the weight 123 at the secondstage is locked with a screw in a constant position relative to theshaft member 124, i.e., the position of the uppermost block 126 in thecase that four load adjusting blocks 126 are stacked, regardless of thenumber of the load adjusting blocks 126. The reason is that it isnecessary to urge the weight 133 at the third stage upward with theuppermost load adjusting block 126.

The part of the shaft member 124 of the weight 123 at the second stageprotruding from the lower end face of the flange member 125 constitutesa shaft portion 123 a, and the part located above the shaft portion 123a constitutes a large diameter portion 123 b. Therefore, the weightholder 140 holds the weight 123 by allowing the shaft portion 123 a ofthe weight 123 to pass therethrough and disallowing the large diameterportion 123 b to pass therethrough.

Three weights 133 are mounted to each of the weight holders 140 at thethird stage. The weight 133 is constituted by a shaft member 134 in theform of an elongate column, a flange member 135 screwed to the middle ofthe shaft member 134 and one or more load adjusting blocks 136 attachedto a part of the shaft member 134 higher than the flange member 135. Thelower end face of the shaft member 134 is in a spherical configuration.The outer diameter of the flange member 135 is greater than the outerdiameter of the shaft member 134. The outer diameter of the loadadjusting blocks 136 is equal to the outer diameter of the flange member135. Each of the load adjusting blocks 136 is formed with a hole throughwhich the shaft member 134 can be inserted. By inserting the shaftmember 134 into the hole, the plurality of load adjusting blocks 136 canbe stacked on the flange member 135. In this case, up to four loadadjusting blocks 136 can be stacked.

The combination of the shaft member 134 and flange member 135 of theweight 133 at the third stage corresponds to the block having apredetermined weight according to the invention, and the weight of thesame is, for example, 25 g. Each of the load adjusting blocks 136 alsocorresponds to the block having a predetermined weight according to theinvention and, for example, it weighs 25 g. Therefore, by changing thenumber of the load adjusting blocks 136, the weight of a weight 133 as awhole can be varied within the range from 25 g to 125 g, 25 g being oneincrement or decrement.

It is not necessary to screw the uppermost load adjusting block 136 ofthe weight 133 at the third stage in a constant position relative to theshaft member 134.

The part of the shaft member 134 of the weight 133 at the third stageprotruding from the lower end face of the flange member 135 constitutesa shaft portion 133 a, and the part located above the shaft portion 133a constitutes a large diameter portion 133 b. Therefore, the weightholder 140 holds the weight 133 by allowing the shaft portion 133 a ofthe weight 133 to pass therethrough and disallowing the large diameterportion 133 b to pass therethrough.

A spiral groove 138 is formed on the shaft portions 113 a, 123 a and 133a of the respective weights 113, 123 and 133. The grooves 138 have afunction of collecting chips (particles) generated by friction betweenthe shaft portions 113 a, 123 a and 133 a and the holes of the weightholders 140 to maintain a smooth operation of the shaft portions 113 a,123 a and 133 a.

The same effect can be achieved by forming spiral grooves 139 on theholes of the weight holders 140 as shown in FIG. 29. This effect can beachieved by providing at least either the grooves 138 or grooves 139.

As shown in FIG. 1, guides 101 extending in the Y-direction are providedon the rail portions 29 provided on the base portion 12. Y-directionmovable portions 103 are provided on the guides 101. The movableportions 103 are provided with engaging portions 102 which engage theguides 101. A movement of the engaging portions 102 along the guides 101causes the movable portions 103 to move in the Y-direction. The movableportions 103 are provided with guides 104 extending in the verticaldirection.

Both ends of the weight holding plate 110 in the horizontal directionare coupled to vertically movable portions 109. The movable portions 109are provided with engaging portions 105 which engage the guides 104. Amovement of the engaging portions 105 along the guides 104 causes themovable portions 109 to move in the vertical direction.

The vertically movable portions 109 are driven by vertical drivingcylinders 108 in the vertical direction. The vertical driving cylinders108, vertically movable portions 109, guides 104 and engaging portions105 correspond to the holding portion moving means (device) according tothe invention. The Y-direction movable portions 103 are driven in theY-direction by Y-direction driving cylinders 107 shown in FIG. 2.

Thus, the load applying portion 100 can be moved in the Y-direction andvertical direction. While FIG. 2 shows a state in which the loadapplying portion 100 has been moved backward to be retracted from aposition above the X-Y table 103, the load applying portion 100 can bemoved forward to be located above the X-Y table 13.

The load applying portion 100 moves the weights from a state in whichthe lower end of the shaft portion 113 a of the weight 113 at the bottomstage is located above the slider holding jig 80 without contacting theslider holding jig 80, thereby loading the slider holding jig 80 withthe weights 113, 123 and 133 provided in the form of a plurality ofstages sequentially from the bottom stage. This operation will bedescribed with reference to FIGS. 30 through 33.

FIG. 30 shows the load applying portion 100 in a state in which thelower ends of the shaft portions 113 a of the weights 113 at the bottomstage are located above the slider holding jig 80. In this state, noexternal load is applied to the slider holding jig 80.

FIG. 31 shows a state in which the load applying portion 100 has beenmoved downward from the state shown in FIG. 30 to put the lower ends ofthe shaft portions 113 a of the weights 113 at the bottom stage incontact with the upper end of the slider holding jig 80, thereby raisingthe weights 113 above the weight holders 140 at the bottom stage. In thestate shown in FIG. 31, the upper ends of the weights 113 are not incontact with the lower ends of the shaft portions 123 a of the weights123 at the second stage. In this state, the slider holding jig 80 isloaded with only the weights 113 at the bottom stage. Since one sliderholding jig 80 is loaded with three weights 113, a load of 75 g isapplied to one slider holding jig 80 where one weight 113 is 25 g.

FIG. 32 shows a state in which the load applying portion 100 has beenfurther moved downward from the state shown in FIG. 31 to put the upperends of the weights 113 at the bottom stage in contact with the lowerends of the shaft portions 123 a of the weights 123 at the second stage,thereby raising the weights 123 above the weight holders 140 at thesecond stage. In the state shown in FIG. 32, the upper ends of theweights 123 are not in contact with the lower ends of the shaft portions133 a of the weights 133 at the third stage. In this state, the sliderholding jig 80 is loaded with the weights 113 at the bottom stage andthe weights 123 at the second stage. Since one slider holding jig 80 isloaded with three weights 113 and three weights 123, a load of 450 g isapplied to one slider holding jig 80 where one weight 113 is 25 g andone weight 123 is 125 g.

FIG. 33 shows a state in which the load applying portion 100 has beenfurther moved downward from the state shown in FIG. 32 to put the upperends of the weights 123 at the second stage in contact with the lowerends of the shaft portions 133 a of the weights 133 at the third stage,thereby raising the weights 133 above the weight holders 140 at thethird stage. In this state, the slider holding jig 80 is loaded with theweights 113 at the bottom stage, the weights 123 at the second stage andthe weights 133 at the third stage. Since one slider holding jig 80 isloaded with three weights 113, three weights 123 and three weights 133,a load of 825 g is applied to one slider holding jig 80 where one weight113 is 25 g; one weight 123 is 125 g; and one weight 133 is 125 g.

In order to achieve such a function of the load applying portion 100,the distance that the weights 113 at the bottom stage can move in thevertical direction must be greater than the sum of the distance betweenthe upper ends of the weights 113 and the lower ends of the shaftportions 123 a of the weights 123 and the distance between the upperends of the weights 123 and the lower ends of the shaft portions 133 aof the weights 133 in a state in which no load is applied to the sliderholding jig 80 (the state shown in FIG. 30).

As described above, according to the present invention, the load appliedto the slider holding jig 80 can be adjusted by loading the sliderholding jig 80 with the plurality of weights 113, 123 and 133 in astepwise manner.

According to the present embodiment, it is therefore possible, forexample, to chamfer an edge of the rail portions of the slider 150 byapplying a small load to the slider holding jig 80 when the edge has notbeen chamfered yet or at an early stage of chamfering and to increasethe load applied to the slider holding jig 80. This makes it possible toprevent an edge of the slider 150 from cutting the thin diamond lappingsheet 39. The number per stage of the weights for applying a load to oneslider 150 may be two, four or more instead of being limited to three.The weight of each of the weights 113, 123 and 133 of the load applyingportion 100 and the weight of the block constituting each of the weights113, 123 and 133 may be changed appropriately.

Although not shown, the processing apparatus of the present embodimentis further equipped with a control portion to which signals in responseto operations on the operation panel 23 and signals output by eachsensor are input and which controls each driving part.

An operation of the processing apparatus 10 of the present embodimentwill now be described. The following description also provides anexplanation of a method for processing a slider according to theinvention.

When sliders 150 are processed using the processing apparatus 10, aplurality of sliders 150 to be processed are first secured to the sliderholding jig 80 by means of, for example, bonding with the surfacesthereof to face a recording medium facing downward. The sliders 150 atthis point is obtained by performing ion milling to form rail portionson a bar which includes a plurality of magnetic head elements arrangedin a row and for which chamfering of surfaces to face a medium has beenfinished and then cutting the bar.

According to the present embodiment, preferably, a chamfering processhaving three steps is performed on a slider holding jig 80 having thesliders 150 secured thereon.

FIG. 34 illustrates a first step of chamfering. At the first step ofchamfering, the plate 90 as shown in FIG. 16 is used instead of the wirewinding blocks 30. The rubber sheet 38 is provided on the plate 90, andthe diamond lapping sheet 39 is provided on the rubber sheet 38. Theplate 70A is used as the slider holding jig setting plate 70. As shownin FIG. 34, at the first step of chamfering, the plate 70A positions theslider holding jig 80 such that the sliders 150 are in contact with thediamond lapping sheet 39 with the surfaces of the sliders 150 to face amedium inclined relative to the lapping surface of the diamond lappingsheet 39.

In the present embodiment, when the slider holding jig 80 is positionedby the plate 70A, the sliders 150 are secured to the slider holding jig80 such that the surfaces to face a medium of the sliders 150 on theside of the air inflow ends thereof are located downward.

An angle θ defined by the lateral walls of the slider holding jig 80 andthe lapping surface of the diamond lapping sheet 39 is preferably equalto or greater than 60° and smaller than 90°, and an angle of 70°±2.5° isespecially preferable.

The lower ends of the shaft portions 113 a of the weights 113 at thebottom stage is in contact with the upper end of the slider holding jig80. As described above, the load applied to the slider holding jig 80can be adjusted. The load applied to the slider holding jig 80 ispreferably increased in a stepwise manner depending on the progress ofchamfering.

At the first step of chamfering, the X-Y table 13 is swung in the stateshown in FIG. 34 to chamfer only edges of the sliders 150 on the side ofthe air inflow ends thereof.

FIG. 35 illustrates a second step of chamfering. The second step ofchamfering employs the wire winding blocks 30 containing the elasticmembers 32 in the recesses 31 a of the block main bodies 31. Therefore,the wire 34 is provided on the elastic members 32; the rubber sheet 38is provided on the wire 34; and the diamond lapping sheet 39 is providedon the rubber sheet 38. The plate 70A is used as the slider holding jigsetting plate 70. As shown in FIG. 35, at the second step of chamfering,the plate 70A positions the slider holding jig 80 such that the sliders150 are in contact with the diamond lapping sheet 39 with the surfacesof the sliders 150 to face a medium inclined relative to the lappingsurf ace of the diamond lapping sheet 39.

An angle θ defined by the lateral walls of the slider holding jig 80 andthe lapping surface of the diamond lapping sheet 39 is preferably equalto or greater than 60° and smaller than 90°, and an angle around 70° isespecially preferable.

The lower ends of the shaft portions 113 a of the weights 113 at thebottom stage is in contact with the upper end of the slider holding jig80. As described above, the load applied to the slider holding jig 80can be adjusted. The load applied to the slider holding jig 80 ispreferably increased in a stepwise manner depending on the progress ofchamfering.

At the second step of chamfering, as shown in FIG. 25, the rubber sheet38 and diamond lapping sheet 39 provided on the wire 34 are transformedsuch that the parts thereof corresponding to first edges 161 and secondedges 162 of the sliders 150 protrude toward the first edges 161 andsecond edges 162. As a result, the diamond lapping sheet 39 contacts atleast the first edges 161 and second edges 162.

At the second step of chamfering, the X-Y table 13 is swung in the stateshown in FIG. 35 to chamfer the edges of the sliders 150 on the side ofthe air inflow ends thereof further and to chamfer the first edges 161and second edges 162 having steps simultaneously. Thus, as a result ofthe first and second steps of chamfering, the edges of the sliders onthe side of the air inflow ends thereof are chamfered in a greateramount than other edges. The edges of the sliders 150 on the side of theair inflow ends thereof are chamfered in a greater amount because theedges on the side of the air inflow ends are more likely to contact arecording medium than other edges. Further, the first and second stepsof chamfering chamfer the edges of the sliders 150 on the side of theair inflow end thereof into slanting surfaces.

FIG. 36 illustrates a third step of chamfering. The third step ofchamfering employs the wire winding blocks 30 containing thetransforming members 33 in the recesses 31 a of the block main bodies31. Therefore, the wire 34 is provided on the projections 33 a of theelastic members 33; the rubber sheet 38 is provided on the wire 34: andthe diamond lapping sheet 39 is provided on the rubber sheet 38. Theplate 70B is used as the slider holding jig setting plate 70. As shownin FIG. 36, at the third step of chamfering, the plate 70B positions theslider holding jig 80 such that the sliders 150 are in contact with thediamond lapping sheet 39 with the surfaces of the sliders 150 to face amedium in parallel with the lapping surface of the diamond lapping sheet39.

The lower ends of the shaft portions 113 a of the weights 113 at thebottom stage is in contact with the upper end of the slider holding jig80. The surfaces to face a medium of the sliders 150 on the side of theair inflow ends thereof are located at the right side of the sliders 150as shown in FIG. 36. In the present embodiment, as shown in FIG. 36, thelower ends of the shaft portions 113 a are put into contact with theupper end of the slider holding jig 80 in a position biased toward theright side thereof in order to chamfer the surfaces to face a medium ofthe sliders 150 on the side of the air inflow ends thereof in a greateramount. As described above, the load applied to the slider holding jig80 can be adjusted. The load applied to the slider holding jig 80 ispreferably increased in a stepwise manner depending on the progress ofchamfering.

At the third step of chamfering, the rubber sheet 38 and diamond lappingsheet 39 provided on the wire 34 are transformed such that the partsthereof corresponding to the first edges 161 and second edges 162 of thesliders 150 protrude toward the first edges 161 and second edges 162. Asa result, the diamond lapping sheet 39 contacts at least the first edges161 and second edges 162.

At the third step of chamfering, the X-Y table 13 is swung in the stateshown in FIG. 36. As a result, the entire edges of the rail portions 153of the sliders 150 including the first edges 161 are chamferedsimultaneously with the second edges 162. At the third step ofchamfering, edges in contact with the diamond lapping sheet 39 includingthe edges chamfered into slanting surfaces at the first and second stepsof chamfering are chamfered into curved surfaces.

While the first through third steps of chamfering may be carried outusing one processing apparatus 10 with the wire winding blocks 30,slider holding jig setting plate 70 and the like replaced at each step,it is more efficient to use three processing apparatuses 10 which areset for respective steps.

Such a method for processing a slider according to the presentembodiment makes it possible to chamfer the edges of the sliders 150 onthe side of the air inflow ends thereof in a greater amount than otheredges. The anti-shock properties of the sliders 150 can be thusimproved.

A comparison of edge configurations will now be made between a casewherein the three steps of chamfering are performed on the edges ofsliders 150 on the side of the air inflow ends thereof and cases whereinother methods for chamfering are carried out on the same.

The methods illustrated in FIGS. 37 and 38 are used as the other methodsfor chamfering for comparison. According to the method shown in FIG. 37,the plate 90 as shown in FIG. 16 is used instead of the wire windingblocks 30 similarly to the first step of chamfering shown in FIG. 34.The rubber sheet 38 is provided on the plate 90, and the diamond lappingsheet 39 is provided on the rubber sheet 38. The plate 70B is used asthe slider holding jig setting plate 70. Therefore, according to themethod shown in FIG. 37, the slider holding jig 80 is positioned suchthat the sliders 150 are in contact with the diamond lapping sheet 39with the surfaces of the sliders 150 to face a medium in parallel withthe lapping surface of the diamond lapping sheet 39. The X-Y table 13 isswung in this state to chamfer the edges of the sliders 150.

According to the method shown in FIG. 38, the wire winding blocks 30containing the elastic members 32 in the recesses 31 a of the block mainbodies 31 are used similarly to the second step of chamfering shown inFIG. 35. Therefore, the wire 34 is provided on the elastic members 32;the rubber sheet 38 is provided on the wire 34; and the diamond lappingsheet 39 is provided on the rubber sheet 38. The plate 70B is used asthe slider holding jig setting plate 70. Therefore, according to themethod shown in FIG. 38, the slider holding jig 80 is positioned suchthat the sliders 150 are in contact with the diamond lapping sheet 39with the surfaces of the sliders 150 to face a medium in parallel withthe lapping surface of the diamond lapping sheet 39. The X-Y table 13 isswung in this state to chamfer the edges of the sliders 150.

FIG. 39 shows an example of a configuration of an edge of a slider 150on the side of the air inflow end thereof chamfered according to themethod shown in FIGS. 37 or 38. FIG. 40 shows an example of aconfiguration of an edge of a slider 150 on the side of the air inflowend thereof chamfered by the three steps of chamfering according to thepresent embodiment. The configurations shown in FIGS. 39 and 40 weremeasured using a probe type surface roughness meter. Talystep (tradename) manufactured by Rank Taylor-Hobson, U.K, was used as the probetype surface roughness meter. The probe used had a radius of curvatureof 2 μm at the end thereof. The horizontal axes and vertical axes ofFIGS. 39 and 40 represent positions in the horizontal and verticaldirections, respectively.

In the configuration shown in FIG. 39, the length of the chamferedregion in the direction of the height thereof was 0.5 μm. In theconfiguration shown in FIG. 40, the length of the chamfered region inthe direction of the height thereof was 5.0 μm. Those figures indicatethat the three steps of chamfering according to the present embodimentmake it possible to chamfer the edges of slider 150 on the side of theair inflow ends thereof in a greater amount, thereby allowing animprovement of the anti-shock properties of the sliders 150.

A description will now be made with reference to FIGS. 41 through 46 onthe relationship between the angle θ defined by the lateral walls of theslider holding jig 80 and the lapping surface of the diamond lappingsheet 39 and configurations of chamfered edges according to the presentembodiment.

When the angle θ at the first and second steps of chamfering was 60° asshown in FIG. 41, an edge had a configuration, for example, as shown inFIG. 42 after the completion of the second step of chamfering and had aconfiguration, for example, as shown in FIG. 43 after the completion ofthe third step of chamfering.

When the angle θ at the first and second steps of chamfering was 75° asshown in FIG. 44, an edge had a configuration, for example, as shown inFIG. 45 after the completion of the second step of chamfering and had aconfiguration, for example, as shown in FIG. 46 after the completion ofthe third step of chamfering.

The configurations shown in FIGS. 42, 43, 45 and 46 were measured in thesame method as that used for FIGS. 39 and 40.

In the configuration shown in FIG. 42, the length of the chamferedregion in the direction of the height thereof was 3.5 μm. In theconfiguration shown in FIG. 45, the length of the chamfered region inthe direction of the height thereof was 2.5 μm. Those figures alsoindicate that the length of the chamfered region in the direction of theheight becomes greater, the smaller the angle θ.

However, it is assumed from a comparison between FIGS. 43 and 46 that achamfered region keeps closeness to a slanting surface moresignificantly the smaller the angle θ, even after the third step ofchamfering. If it is assumed that the configuration shown in FIG. 43represents the limit of an allowable range, the angle θ must be 60° ormore.

As described above, the processing apparatus 10 and the method forprocessing a slider according to the present embodiment make it possibleto chamfer the edges of the slider 150 on the side of the air inflow endthereof in a greater amount and to chamfer the first edges 161 andsecond edges 162 having steps. The present embodiment therefore makes itpossible to provide a slider 150 for which damage of the surface of arecording medium caused by edges thereof can be prevented even if it isinclined.

Since a negative pressure slider is more likely to contact a recordingmedium at the first edges 161 when inclined compared to a slider whichdoes not generate a negative pressure, the processing apparatus 10 andthe method for processing a slider according to the present embodimentare significantly effective especially in processing a negative pressureslider.

The method for processing a slider according to the present embodimentmakes it possible to sufficiently chamfer not only the edges of theslider 150 on the side of the air inflow end thereof, the first edges161 and the second edges 162 but also other regions including theperiphery of the surfaces to face a medium of the rail portions 153 andthe periphery of the outer circumferential surfaces of the slider 150close to the surfaces to face a medium. It is therefore possible toprovide a slider 150 for which damage on a recording medium can beprevented even if the slider 150 is inclined in various ways.

In the processing apparatus 10 and the method for processing a slideraccording to the present embodiment, the diamond lapping sheet 39 istransformed to put it in contact with the first edges 161 and secondedges 162 of the slider 150. Since the diamond lapping sheet 39 is heldby the elastic rubber sheet 38 in doing so, it is possible to preventthe diamond lapping sheet 39 from being cut and to thereby performstable processing of the slider 150.

According to the present embodiment, it is further possible to adjustthe load applied to the slider holding jig 80 by loading the sliderholding jig 80 with the plurality of weights 113, 123 and 133 in astepwise manner. Therefore, the present embodiment makes it possible toprevent the thin diamond lapping sheet 39 from being cut by the edges ofthe slider 150.

Further, according to the present embodiment, the spiral grooves 138 or139 are formed on at least either the shaft portions 113 a, 123 a and133 a of the weights 113, 123 and 133 or the holes of the weight holders140. The grooves 138 or 139 collect chips (particles) generated byfriction between the shaft portions 113 a, 123 a and 133 a and the holesof the weight holders 140, thereby making it possible to maintain astable operation of the shaft portions 113 a, 123 a and 133 a.

According to the present embodiment, a slider holding jig setting plate70A having holes 76A inclined at a predetermined angle relative to thevertical is prepared as one type of slider holding jig setting plate 70.The plate 70A positions the slider holding jig 80 such that the slider150 is in contact with the diamond lapping sheet 39 with the surfaces ofthe slider to face a medium inclined relative to the lapping surface ofthe diamond lapping sheet 39. Therefore, according to the presentembodiment, the use of the slider holding jig setting plate 70A makes itpossible to chamfer specific edges of the slider 150, e.g., the edges ofthe slider 150 on the side of the air inflow end thereof, in a greateramount than other edges.

Further, according to the present embodiment, in order to chamfer thefirst edges 161 and second edges 162 having steps simultaneously, therubber sheet 38 and diamond lapping sheet 39 are transformed by the wire34. In the present embodiment, the wire 34 is stretched by splitting itinto a plurality of segments using the plurality of wire winding blocks30 instead of stretching it across the entire surface of the plate 18.As a result, the present embodiment makes it possible to stabilize thetension of the wire 34, thereby allowing an improvement of processingaccuracy.

The present invention is not limited to the above-described embodimentand may be modified in various ways. For example, while the diamondlapping sheet 39 is moved by the X-Y table 13 with the slider 150 fixedin the embodiment, the slider 150 may alternatively be moved (swung) bymoving the slider holding jig 80 with the diamond lapping sheet 39fixed.

The invention is not limited to sliders having a configuration as shownin FIG. 24 and may be applied to sliders having other configurations.The present invention is not limited to sliders having a two-stepstructure and may be applied to processing of sliders having structureswith three or more steps.

While the embodiment has referred to a negative pressure slider as anexample of a slider to be processed, the invention may be applied toprocessing of sliders which generates no negative pressure.

The invention may be applied also to sliders intended for applicationsother than magnetic heads, e.g., a slider for a head (pick-up) forrecording or reproducing information on an optical recording basis orphoto-magnetic recording basis.

As described above, the first slider processing apparatus or the firstload applying apparatus for processing a slider according to theinvention allows adjustment of a load applied to the slider holder. Thismakes it possible to prevent edges of a slider from cutting the lappingmember. According to the first method for processing a slider of theinvention, a load applied to the slider holder for holding a slider isvaried depending on the progress of chamfering on the slider, whichmakes it possible to prevent edges of the slider from cutting thelapping member.

The second slider processing apparatus or the second load applyingapparatus for processing a slider according to the invention moves theweight holding portion for holding weights up and down to make itpossible to apply a load to the slider holder for holding a slider onlywhen necessary during lapping of edges of the slider to chamfer theedges, and a spiral groove is formed on at least either the outercircumferential surface of the shaft portion of the weight to apply aload to the slider holder or the inner circumferential surface of thehole of the weight holding portion. As a result, the spiral groovecollects chips (particles) generated by friction between the shaftportion of the weight and the hole of the weight holding portion, whichallows a smooth operation of the shaft portion to be maintained andconsequently allows a smooth operation of the mechanism.

With the third slider processing apparatus or the second method forprocessing a slider according to the invention, the slider holder ispositioned such that the slider is in contact with the lapping memberwith surfaces of the slider to face a medium inclined relative to thelapping surface of the lapping member to lap the edges of the slider.This makes it possible to chamfer a part of the edges of the slider in agreater amount than other edges.

The third method for processing a slider of the invention includes:

a first lapping step for lapping a part of an edge of the slider incontact with the lapping member while moving the slider and the lappingmember relative to each other in a state in which the slider is incontact with the lapping member with the surface of the slider to face amedium inclined relative to the lapping surface of the lapping memberfor lapping an edge of a slider; and

a second lapping step for lapping a part of the edge of the slider incontact with the lapping member while moving the slider and the lappingmember relative to each other in a state in which the slider is incontact with the lapping member with the surface of the slider to face amedium in parallel with the lapping surface of the lapping member. It isthus possible to lap a part of edges of a slider in a greater amountthan other edges and to chamfer also the other edges sufficiently.

Since the first auxiliary device for processing a slider according tothe invention makes it possible to position the slider holder such thata slider is in contact with the lapping member with a surface of theslider to face a medium inclined relative to the lapping surface of thelapping member, it is possible to lap a part of edges of a slider in agreater amount than other edges.

In the fourth slider processing apparatus or the second auxiliary devicefor processing a slider according to the invention, the wire fortransforming the lapping member such that a plurality of edges havingsteps of a slider are simultaneously lapped is wound around the outercircumference of the main body. This stabilizes the tension of the wire,makes it possible to simultaneously lap a plurality of edges havingsteps of a slider to chamfer them and allows an improvement ofprocessing accuracy.

It is apparent from the above description that the invention can becarried out in various modes and modifications. Therefore, the inventionmay be carried out in modes other than the above-described mostpreferable modes within the scope of equivalence of the appended claims.

What is claimed is:
 1. A slider processing apparatus for lapping an edgeof a slider having a surface to face a medium to chamfer the edge,comprising: a slider holder for holding a slider; a lapping member forlapping an edge of the slider held by said slider holder; load applyingmeans for applying a load to the slider holder so as to urge the sliderheld by said slider holder against said lapping member, capable ofadjusting the load applied to the slider holder; and moving means formoving the slider held by said slider holder and said lapping memberrelative to each other such that the edge of the slider is lapped bysaid lapping member.
 2. A slider processing apparatus according to claim1, wherein said lapping member is in the form of a sheet.
 3. A sliderprocessing apparatus according to claim 1, wherein said load applyingmeans has: a plurality of weights for applying a load to the sliderholder; and load adjusting means for adjusting the load by applying theload originating from said plurality of weights to the slider holder ina stepwise manner.
 4. A slider processing apparatus according to claim3, wherein said weights include a shaft portion and a large diameterportion greater in the diameter than said shaft portion; said loadadjusting means includes weight holding portions in the form of aplurality of stages each formed with a hole which allows the shaftportion of said weight to pass therethrough and disallows said largediameter portion to pass therethrough for holding said weight movably inthe axial direction of the shaft portion with said hole and includesweight holding portion moving means for moving said weight holdingportion up and down; and said load adjusting means moves said weightholding portions downward with said weight holding portion moving meansfrom a position in which the lower end of the shaft portion of theweight held by the weight holding portion at the bottom stage is locatedabove the slider holder without contacting the slider holder to load theslider holder with the weights held by the weight holding portions inthe form of a plurality of stages sequentially from the bottom stage. 5.A slider processing apparatus according to claim 3, wherein said weightscomprise one or more blocks having a predetermined weight.
 6. A sliderprocessing apparatus according to claim 4, wherein a spiral groove isformed on at least either the outer circumferential surface of the shaftportions of said weights or the inner circumferential surface of theholes of said weight holding portions.
 7. A slider processing apparatusaccording to claim 1, wherein said lapping member has a lapping surface,said processing apparatus further comprising a positioning device forpositioning said slider holder such that a slider is put into contactwith said lapping member in a state in which the surface of the sliderto face a medium is inclined relative to the lapping surface of saidlapping member.
 8. A slider processing apparatus according to claim 7,wherein said slider includes a plurality of edges having steps; and saidlapping member has flexibility, said processing apparatus furthercomprising transforming means for transforming said lapping member suchthat the plurality of edges having steps of the slider aresimultaneously lapped by said lapping member.
 9. A slider processingapparatus according to claim 1, wherein said slider includes a pluralityof edges having steps; and said lapping member has flexibility, saidprocessing apparatus further comprising a transforming device fortransforming said lapping member such that the plurality of edges havingsteps of the slider are simultaneously lapped by said lapping member,having a main body provided in a position opposite to the slider held bysaid slider holder with said lapping member sandwiched therebetween anda wire wound around the outer circumference of said main body fortransforming said lapping member.
 10. A slider processing apparatusaccording to claim 9, wherein said transforming device further has anelastic member provided under a part of said wire located on the topsurface of said transforming device.
 11. A slider processing apparatusaccording to claim 9, wherein said transforming device further has aprojection provided under a part of said wire located on the top surfaceof said transforming device.
 12. A load applying apparatus forprocessing a slider, which is used for a slider processing apparatus forlapping an edge of a slider having a surface to face a medium to chamferthe edge, having a slider holder for holding a slider having a surfaceto face a medium, a lapping member for lapping an edge of the sliderheld by said slider holder and moving means for moving the slider heldby said slider holder and said lapping member relative to each other soas to lap the edge of the slider with said lapping member, for applyinga load to said slider holder so as to urge the slider held by saidslider holder against said lapping member, said load applying apparatuscomprising: a plurality of weights for applying a load to a sliderholder; and load adjusting means for adjusting the load by applying theload originating from said plurality of weights to the slider holder ina stepwise manner, said weights including a shaft portion and a largediameter portion which is greater in the diameter than said shaftportion, said load adjusting means including weight holding portions inthe form of a plurality of stages each formed with a hole which allowsthe shaft portion of said weight to pass therethrough and disallows saidlarge diameter portion to pass therethrough for holding said weightmovably in the axial direction of the shaft portion with said hole andincluding weight holding portion moving means for moving said weightholding portion up and down, said load adjusting means moving saidweight holding portion downward with said weight holding portion movingmeans from a position in which the lower end of the shaft portion of theweight held by the weight holding portion at the bottom stage is locatedabove the slider holder without contacting the slider holder to load theslider holder with the weights held by the weight holding portions inthe form of a plurality of stages sequentially from the bottom stage.13. A load applying apparatus for processing a slider according to claim12, wherein said weights comprise one or more blocks having apredetermined weight.
 14. A load applying apparatus for processing aslider according to claim 12, wherein a spiral groove is formed on atleast either the outer circumferential surface of the shaft portions ofsaid weights or the inner circumferential surface of the holes of saidweight holding portions.
 15. A slider processing apparatus for lappingan edge of a slider having a surface to face a medium to chamfer theedge, comprising: a slider holder for holding a slider; a lapping memberfor lapping an edge of the slider held by said slider holder; loadapplying means for applying a load to the slider holder so as to urgethe slider held by said slider holder against said lapping member; andmoving means for moving the slider held by said slider holder and saidlapping member relative to each other such that the edge of the slideris lapped by said lapping member, wherein said load applying means has:a weight including a shaft portion which can be put into contact withsaid slider holder at the lower end thereof and a large diameter portiongreater in the diameter than said shaft portion; a weight holdingportion formed with a hole which allows the shaft portion of said weightto pass therethrough and which disallows said large-diameter portion topass therethrough for holding said weight movably in the axial directionof said shaft portion with said hole; and weight holding portion movingmeans for moving the weight holding portion up and down and wherein aspiral groove is formed on at least either the outer circumferentialsurface of the shaft portion of said weight or the inner circumferentialsurface of the hole of said weight holding portion.
 16. A sliderprocessing apparatus according to claim 15, wherein a plurality of saidweight holding portions are provided in the form of stages to hold aplurality of weights; and said load applying means moves said weightholding portions downward with said weight holding portion moving meansfrom a state in which the lower end of the weight held by the weightholding portion at the bottom stage is located above the slider holderwithout contacting the slider holder to load the slider holder with theweights held by the weight holding portions in the form of a pluralityof stages sequentially from the bottom stage.
 17. A slider processingapparatus according to claim 15, wherein said weights comprise one ormore blocks having a predetermined weight.
 18. A load applying apparatusfor processing a slider, used for a slider processing apparatus forlapping an edge of a slider having a surface to face a medium to chamferthe edge, having a slider holder for holding a slider having a surfaceto face a medium, a lapping member for lapping an edge of the sliderheld by said slider holder and moving means for moving the slider heldby said slider holder and said lapping member relative to each other soas to lap the edge of the slider with said lapping member, for applyinga load to said slider holder so as to urge the slider held by saidslider holder against said lapping member, said load applying apparatuscomprising: a weight including a shaft portion which can be put intocontact with said slider holder at the lower end thereof and a largediameter portion greater in the diameter than said shaft portion; aweight holding portion formed with a hole which allows the shaft portionof said weight to pass therethrough and which disallows saidlarge-diameter portion to pass therethrough, for holding said weightmovably in the axial direction of said shaft portion with said hole; andweight holing portion moving means for moving said weight holdingportion up and down, wherein a spiral groove is formed on at leasteither the outer circumferential surface of the shaft portion of saidweight or the inner circumferential surface of the hole of said weightholding portion.
 19. A load applying apparatus for processing a slideraccording to claim 18, said weight comprises one or more blocks having apredetermined weight.
 20. A slider processing apparatus for lappingedges of a slider having a surface to face a medium to chamfer theedges, comprising: a slider holder for holding a slider; a lappingmember having a lapping surface for lapping an edge of the slider heldby said slider holder; a positioning device for positioning said sliderholder such that the slider contacts the lapping member with a surfaceof the slider to face a medium inclined relative to the lapping surfaceof said lapping member; and moving means for moving the slider held bysaid slider holder and said lapping member relative to each other suchthat the edge of the slider is lapped by said lapping member.
 21. Aslider processing apparatus according to claim 20, wherein said sliderincludes a plurality of edges having steps; and said lapping member hasflexibility, said processing apparatus further comprising transformingmeans for transforming said lapping member such that the plurality ofedges having steps of the slider are simultaneously lapped by saidlapping member.
 22. An auxiliary device for processing a slider, whichis used for a slider processing apparatus for lapping an edge of aslider having a surface to face a medium to chamfer the edge, having aslider holder for holding a slider having a surface to face a medium, alapping member for lapping an edge of the slider held by said sliderholder and moving means for moving the slider held by said slider holderand said lapping member relative to each other so as to lap the edge ofthe slider with said lapping member, for positioning said slider holderrelative to said lapping member, said auxiliary device comprising: amain body located above said lapping member; and a positioning portionformed on said main body for positioning said slider holder such that aslider is put into contact with the lapping member with a surface of theslider to face a medium inclined relative to the lapping surface of saidlapping member.
 23. A slider processing apparatus for lapping edges of aslider including a plurality of edges having steps and a surface to facea medium to chamfer the edges, comprising: a slider holder for holding aslider; a flexible lapping member for lapping edges of the slider heldby said slider holder; a transforming device for transforming saidlapping member such that the plurality of edges having steps of theslider are simultaneously lapped by said lapping member, having a mainbody located opposite to the slider held by said slider holder with saidlapping member sandwiched therebetween and a wire wound around the outercircumference of said main body for transforming said lapping member;and moving means for moving the slider held by said slider holder andsaid lapping member relative to each other such that the edges of theslider is lapped by said lapping member.
 24. A slider processingapparatus according to claim 23, wherein said transforming devicefurther has an elastic member provided under a part of said wire locatedon the upper surface of said transforming device.
 25. A sliderprocessing apparatus according to claim 23, wherein said transformingdevice further has a projection provided under a part of said wirelocated on the upper surface of said transforming device.
 26. Anauxiliary device used for a slider processing apparatus for lappingedges of a slider having a surface to face a medium to chamfer theedges, having a slider holder for holding a slider having a plurality ofedges having steps and a surface to face a medium, a flexible lappingmember for lapping the edges of the slider held by said slider holderand moving means for moving the slider held by said slider holder andsaid lapping member relative to each other so as to lap the edges of theslider with said lapping member, comprising: a main body located in aposition opposite to a slider held by said slider holder with saidlapping member sandwiched therebetween; and a wire wound around theouter circumference of said main body for transforming said lappingmember such that a plurality of edges having steps of the slider aresimultaneously lapped by said lapping member.
 27. An auxiliary devicefor processing a slider according to claim 26, further comprising anelastic member provided under a part of said wire located on the uppersurface of said auxiliary device for processing a slider.
 28. Anauxiliary device for processing a slider according to claim 26, furthercomprising a projection provided under a part of said wire located onthe upper surface of said auxiliary device for processing a slider. 29.A slider processing apparatus for lapping an edge of a slider having asurface to face a medium to chamfer the edge, comprising: a sliderholder for holding a slider; a lapping member for lapping an edge of theslider held by said slider holder; a load applying apparatus forapplying a load to the slider holder so as to urge the slider held bysaid slider holder against said lapping member, capable of adjusting theload applied to the slider holder; and a moving device for moving theslider held by said slider holder and said lapping member relative toeach other such that the edge of the slider is lapped by said lappingmember.
 30. A slider processing apparatus according to claim 29, whereinsaid lapping member is in the form of a sheet.
 31. A slider processingapparatus according to claim 29, wherein said load applying apparatushas: a plurality of weights for applying a load to the slider holder;and a load adjusting device for adjusting the load by applying the loadoriginating from said plurality of weights to the slider holder in astepwise manner.
 32. A slider processing apparatus according to claim31, wherein said weights include a shaft portion and a large diameterportion greater in the diameter than said shaft portion; said loadadjusting device includes weight holding portions in the form of aplurality of stages each formed with a hole which allows the shaftportion of said weight to pass therethrough and disallows said largediameter portion to pass therethrough for holding said weight movably inthe axial direction of the shaft portion with said hole and includes aweight holding portion moving device for moving said weight holdingportion up and down; and said load adjusting device moves said weightholding portions downward with said weight holding portion moving devicefrom a position in which the lower end of the shaft portion of theweight held by the weight holding portion at the bottom stage is locatedabove the slider holder without contacting the slider holder to load theslider holder with the weights held by the weight holding portions inthe form of a plurality of stages sequentially from the bottom stage.33. A slider processing apparatus according to claim 32, wherein aspiral groove is formed on at least either the outer circumferentialsurface of the shaft portions of said weights or the innercircumferential surface of the holes of said weight holding portions.34. A slider processing apparatus according to claim 31, wherein saidweights comprise one or more blocks having a predetermined weight.
 35. Aslider processing apparatus according to claim 29, wherein said lappingmember has a lapping surface, said processing apparatus furthercomprising a positioning device for positioning said slider holder suchthat a slider is put into contact with said lapping member in a state inwhich the surface of the slider to face a medium is inclined relative tothe lapping surface of said lapping member.
 36. A slider processingapparatus according to claim 35, wherein said slider includes aplurality of edges having steps; and said lapping member hasflexibility, said processing apparatus further comprising a transformingdevice for transforming said lapping member such that the plurality ofedges having steps of the slider are simultaneously lapped by saidlapping member.
 37. A slider processing apparatus according to claim 29,wherein said slider includes a plurality of edges having steps; and saidlapping member has flexibility, said processing apparatus furthercomprising a transforming device for transforming said lapping membersuch that the plurality of edges having steps of the slider aresimultaneously lapped by said lapping member, having a main bodyprovided in a position opposite to the slider held by said slider holderwith said lapping member sandwiched therebetween and a wire wound aroundthe outer circumference of said main body for transforming said lappingmember.
 38. A slider processing apparatus according to claim 37, whereinsaid transforming device further has an elastic member provided under apart of said wire located on the top surface of said transformingdevice.
 39. A slider processing apparatus according to claim 37, whereinsaid transforming device further has a projection provided under a partof said wire located on the top surface of said transforming device. 40.A load applying apparatus for processing a slider, which is used for aslider processing apparatus for lapping an edge of a slider having asurface to face a medium to chamfer the edge, having a slider holder forholding a slider having a surface to face a medium, a lapping member forlapping an edge of the slider held by said slider holder and a movingdevice for moving the slider held by said slider holder and said lappingmember relative to each other so as to lap the edge of the slider withsaid lapping member, for applying a load to said slider holder so as tourge the slider held by said slider holder against said lapping member,said load applying apparatus comprising: a plurality of weights forapplying a load to a slider holder; and a load adjusting device foradjusting the load by applying the load originating from said pluralityof weights to the slider holder in a stepwise manner, said weightsincluding a shaft portion and a large diameter portion which is greaterin the diameter than said shaft portion, said load adjusting deviceincluding weight holding portions in the form of a plurality of stageseach formed with a hole which allows the shaft portion of said weight topass therethrough and disallows said large diameter portion to passtherethrough for holding said weight movably in the axial direction ofthe shaft portion with said hole and including a weight holding portionmoving device for moving said weight holding portion up and down, saidload adjusting device moving said weight holding portion downward withsaid weight holding portion moving device from a position in which thelower end of the shaft portion of the weight held by the weight holdingportion at the bottom stage is located above the slider holder withoutcontacting the slider holder to load the slider holder with the weightsheld by the weight holding portions in the form of a plurality of stagessequentially from the bottom stage.
 41. A load applying apparatus forprocessing a slider according to claim 40, wherein said weights compriseone or more blocks having a predetermined weight.
 42. A load applyingapparatus for processing a slider according to claim 40, wherein aspiral groove is formed on at least either the outer circumferentialsurface of the shaft portions of said weights or the innercircumferential surface of the holes of said weight holding portions.43. A slider processing apparatus according for lapping an edge of aslider having a surface to face a medium to chamfer the edge,comprising: a slider holder for holding a slider; a lapping member forlapping an edge of the slider held by said slider holder; a loadapplying device for applying a load to the slider holder so as to urgethe slider held by said slider holder against said lapping member; and amoving device for moving the slider held by said slider holder and saidlapping member relative to each other such that the edge of the slideris lapped by said lapping member, wherein said load applying device has:a weight including a shaft portion which can be put into contact withsaid slider holder at the lower end thereof and a large diameter portiongreater in the diameter than said shaft portion; a weight holdingportion formed with a hole which allows the shaft portion of said weightto pass therethrough and which disallows said large-diameter portion topass therethrough for holding said weight movably in the axial directionof said shaft portion with said hole; and a weight holing portion movingdevice for moving the weight holding portion up and down and wherein aspiral groove is formed on at least either the outer circumferentialsurface of the shaft portion of said weight or the inner circumferentialsurface of the hole of said weight holding portion.
 44. A sliderprocessing apparatus according to claim 43, wherein a plurality of saidweight holding portions are provided in the form of stages to hold aplurality of weights; and said load applying device moves said weightholding portions downward with said weight holding portion moving devicefrom a state in which the lower end of the weight held by the weightholding portion at the bottom stage is located above the slider holderwithout contacting the slider holder to load the slider holder with theweights held by the weight holding portions in the form of a pluralityof stages sequentially from the bottom stage.
 45. A slider processingapparatus according to claim 43, wherein said weights comprise one ormore blocks having a predetermined weight.
 46. A load applying apparatusfor processing a slider, used for a slider processing apparatus forlapping an edge of a slider having a surface to face a medium to chamferthe edge, having a slider holder for holding a slider having a surfaceto face a medium, a lapping member for lapping an edge of the sliderheld by said slider holder and a moving device for moving the sliderheld by said slider holder and said lapping member relative to eachother so as to lap the edge of the slider with said lapping member, forapplying a load to said slider holder so as to urge the slider held bysaid slider holder against said lapping member, said load applyingapparatus comprising: a weight including a shaft portion which can beput into contact with said slider holder at the lower end thereof and alarge diameter portion greater in the diameter than said shaft portion;a weight holding portion formed with a hole which allows the shaftportion of said weight to pass therethrough and which disallows saidlarge-diameter portion to pass therethrough, for holding said weightmovably in the axial direction of said shaft portion with said hole; anda weight holing portion moving device for moving said weight holdingportion up and down, wherein a spiral groove is formed on at leasteither the outer circumferential surface of the shaft portion of saidweight or the inner circumferential surface of the hole of said weightholding portion.
 47. A load applying apparatus for processing a slideraccording to claim 46, said weight comprises one or more blocks having apredetermined weight.
 48. A slider processing apparatus for lappingedges of a slider having a surface to face a medium to chamfer theedges, comprising: a slider holder for holding a slider; a lappingmember having a lapping surface for lapping an edge of the slider heldby said slider holder; a positioning device for positioning said sliderholder such that the slider contacts the lapping member with a surfaceof the slider to face a medium inclined relative to the lapping surfaceof said lapping member; and a moving device for moving the slider heldby said slider holder and said lapping member relative to each othersuch that the edge of the slider is lapped by said lapping member.
 49. Aslider processing apparatus according to claim 48, wherein said sliderincludes a plurality of edges having steps; and said lapping member hasflexibility, said processing apparatus further comprising a transformingdevice for transforming said lapping member such that the plurality ofedges having steps of the slider are simultaneously lapped by saidlapping member.
 50. A slider processing apparatus for lapping edges of aslider including a plurality of edges having steps and a surface to facea medium to chamfer the edges, comprising: a slider holder for holding aslider; a flexible lapping member for lapping edges of the slider heldby said slider holder; a transforming device for transforming saidlapping member such that the plurality of edges having steps of theslider are simultaneously lapped by said lapping member, having a mainbody located opposite to the slider held by said slider holder with saidlapping member sandwiched therebetween and a wire wound around the outercircumference of said main body for transforming said lapping member;and a moving device for moving the slider held by said slider holder andsaid lapping member relative to each other such that the edges of theslider is lapped by said lapping member.
 51. A slider processingapparatus according to claim 50, wherein said transforming devicefurther has an elastic member provided under a part of said wire locatedon the upper surface of said transforming device.
 52. A sliderprocessing apparatus according to claim 50, wherein said transformingdevice further has a projection provided under a part of said wirelocated on the upper surface of said transforming device.